备件清单1461_厦门纪扬科技有限公司

备件清单1461

型号：1
品牌：进口
应用：工业设备
单价：￥1

产品描述

Sensor Box ASM 300mm With

0040-34866

LINER CATHODE MAG RING WAFFEL-LESS DPS

0040-79912

LINER CHAMBER W/ LEAK CHECK PORT, 300MM

0040-37642

DPS UPPER LINER ASSY PART OF CENTURA CENTRIS

0041-92202

LINER CHAMBER W/ LEAK CHECK PORT, 300MM

0040-38360

PRODUCER CHAMBER

0040-79913

LINER, CATHODE, DIRECT COOLED, 300MM EMA

0040-38659

LID, QUARTZ WINDOW, PRODUCER 200MM

0040-79914

DGDP 4+4+1,SMOOTH 120RA,HDL 300MM EMAX

0040-82246

BLOK GAS FEED, TOP CLEAN, ALN 300MM ULTIMA X

0040-79919

LINER, DGDP, CHAMBER, WAFFLE-LESS, 200MM E-MAX ETCH

0040-86514

SHIELD,LOWER300MMPCXT/RPC+

0040-79920

Liner Cathode Mag Ring Waffle Emax

0040-88628

SHOWERHEAD HEATED BRAZED 300MM AFEOL

0040-82011

PUMPING PLATE AFEOL 300MM

0040-95475

HIGH DEP RATE FACEPLATE TEOS

0041-14565

WATERBOX,SPIRALSH,ALD

0041-08152

SPOCL INSERT LOWER LINER DPS ADVANTEDGE

0041-25016

FACEPLATE, .70 THK, NO CENTER HOLE

0041-13896

Faceplate 26Mil Centerhole RF CAP 300MM SA CVD

0041-31335

PLATE, GAS DISTRIBUTION, TXZ 300MM CVD

0041-90254

WATERBOX,SPIRALSH,ALD

0041-51666

LIDPLATE,LOMBARD,ALD,300MM

0041-56873

LIDPLATE,SPIRALLID,MALD

0041-63574

OUTSHIELD,CHAMBEREXHAUST,ALD300MM

0041-63380

SHIELD,CHAMBEREXHAUSTPOCKET,ALD300MM

0041-87672

WATERBOX,SIDE1,SPIRALSH,ALD

0041-63385

INNERSHIELD,CHAMBEREXHAUST,ALD300MM

0041-94615

FUNNEL,HVMHYBRIDLID,COATED,WATSON

0042-04716

Block gas FEED

0041-94616

PUMPINGPLATE300MMCVD/ALD,WATSON

0051-19408

LINER,DUMP,ONLID,LOMBARD,ALD

0200-00531

PUMP PLATE, CVD 300MM TXZ

0021-54545

BLOCKER, PERF,SILOX 8

0045-00250

MATCHED PAIR,CHAMBER LINER,-CH body lower protector

0020-24386

COVER RING 6 101 SST/MATL

0020-26583

6" DISK SHUTTER 101 PROCESS

AMAT产品

物料号

名称/工艺要求

物料号

名称/工艺要求

0270-15134

DUMMY HOUSING, CHAMBER LEAK CHECK,

0270-14534

FRONT PLATE,

0270-13907

HPC MOUNT BRACKET, COMMON CART,

0270-12926

DUMMY STACK, FACEPLATE AND BLOCKER, PRIS,

0270-12850

ENGINE STAND TRILLIUM ADAPTER PLATE,

0270-12655

LIFTING HANDLE,MOUNTING RING-SYM3X WIDE LID

0270-12370

DUMMY STACK, FACE PLATE AND BLOCKER, TESSERACT

0270-11387

TOOL, SLD ROD CONCENTRICITY SYM3 CH

0270-11381

FIXTURE, CENTRIS RB ALT LL REF LOCATION SPANNER BAR,

0270-10785

SIDE PUMPING ISOLATOR ALIGNMENT JIG, PRODUCER PRECISION

0270-10175

ASSEMBLY, CENTER JIG SICONI PRECLEAN CVD 300MM ENDURA2,

0270-08855

RS JIG ASSEMBLY,PRODUCER PRECISION

0270-06744

BAR, PVD PROCESS HEIGHT MEASUREMENT,ENDURA 300MM

0270-06295

HEATER LIFT ADJUST TOOL

0270-05981

VACUUM TEST DOME,XP ROBOT BUILD

0270-04422

CENTERING JIG, APF SR HEATER, 200MM PRODUCER

0270-04388

HEATER TARGET PLATE, HTR CENTRG／HAND-OFF TOOL, 200MM PRODUCE

0247-03528

DOOR SLIT VALVE,WAFFLE-LESS,200MM EMAX

0247-02311

AGS 0247-02311 Rev.01

0245-73457

KIT ASSY LOWER WRIST EE VAC RBT 100KX

0245-73456

KIT ASSY UPPER WRIST EE VAC RBT 1100KX

0242-72649

KIT ASSY BACKING PLATE W／4 SLOT GUM DROP INSERT 15KAX,

0242-71596

KIT CENTERING ASSY RIGHT 55K CVD TSSL,

0045-00673

MANIFOLD, GAS SHOWER-HEAD, LID, ALUMINUM

0045-00648

ROD, CONDUCTIVE, RF RETURN

0045-00071

FLANGE, CLAMP BELLOWS HEATER 300MM PVD

0043-74384

NTERFACE PLATE 25KAXI DSSL,

0043-72327

GAS DEFLECTOR MOUNTING FIXTURE RIM TYPE PCH 25KPXI2

0043-71796

BRACKET FINGER END EFFECTOR 100KX

0043-71733

BRACKET BEARING MTG,SERVICE CART PC LID

0043-71276

PLATE FRONT COOLING PCH 65KS CVD

0042-76734

BOTTOM PLATE, BR,

0042-76605

BACKBONE, SA LIFT, PSM,

0042-76013

GASBOX, SYMMETRIC FEED ON UX, PRODUCER PRECISION,

0042-75930

DEC PLENUM PLATE, ON, 90-125 CB39 HD16, PRECISION S2,

0042-75830

UPPER LINER,

0042-75305

TRAY, BOTTOM LINER,

0042-75260

OP MNFD CTR FEED S2,

0042-75224

PUMPING PLATE, INVERTED THROAT, PEALD, SIDE PUMP-C1 (240X2.65MM HOLE),

0042-74657

ARM LEFT ALIGNER DSSL 100KX,

0042-74656

ARM RIGHT ALIGNER DSSL 100KX

0042-74260

J BOX,T／C A／C Z-DRIVE PCH 55KSi／60KX CVD

0042-73969

GUM DROP W／GAS DEFLECTOR CTR MTG HOLE

0042-73612

ARM,LEFT ALIGNER,FLAP SIDE, 60KX DSSL

0042-73526

INSERT GUM DROP 3 SLOT WITH SPACER CVD 60K

0042-73392

HARD STOP,RIGHT,ALIGNER ZERO GAP,20K TFE DSSL

0042-73391

HARD STOP LEFT ALIGNER ZERO GAP 20K TFE DSSL

0042-73081

CENTER BEARING HOUSING IO／FLAP DOOR 90KX LOADLOCK,

0042-72742

DOOR BASE SV 20K TFE 1200X200mm2,

0042-72020

X-PLATE CASETTE HC, 25KPXI,

0042-71147

ARM ALIGNER LEFT 20KPXI DSSL

0042-71141

HOUSING FEEDTHRU UPPER SUSC SHAFT PUMPING, CVD 20KPXI

0042-71134

ARM ALIGNER RIGHT 20KPXI DSSL

0042-71052

IO DOOR 20KPXI DSSL

0042-70940

SFV BODY, 7K TURBO PUMP,

0042-70821

0042-70821 REV 01 BOTTOM PLATE, BR,

0042-70800

UPPER LID, PRISM 3.0,

0042-70695

SPACER, COMMON LID, FLOATING, PEALD,

0042-70693

SPACER, COMMON LID, FLOATING, PEALD,

0042-70683

SPACER, COMMON LID, PEALD,

0042-70576

OP MNFD CTR FEED S1,

0042-70501

CH ADAPTER EXHAUST, 300MM SELECTIVE PRECLEAN,

0042-70472

LID RING, WIDE LID, MORAGA 3,

0042-70433

BACKBONE, SA LIFT, PSM,

0042-70192

PUMPING RING TOP,THERMAL BASE, MOX, 3＂ SINGLE PORT, MR1237,

0042-70191

THERMAL LOWER LINER,LARGE BORE, SINGLE PORT, NO PRG, NO DIFFRENTIAL PUMPING,

0042-70184

UPPER LINER, HEATED, HIGH COMPRESSION, 40MM,GAP,

0042-70044

RESERVOIR BLOCK 1, HEATED, TESSERACT ALD,

0042-70005

BLOCKER RING CARBON; 12X,

0042-64999

RESERVOIR BLOCK 2, NON HEATED, TESSERACT ALD,

0042-64870

THERMAL CHOKE PLATE S2 & S4 GD, PSM 2.0,

0042-64869

THERMAL CHOKE PLATE S1 & S3 GD, PSM 2.0,

0042-64558

MANIFOLD, 7L RPS, KODIAK,

0042-64490

LID PLATE, VOLGA-B,

0042-64419

COOLING FLANGE, 7L RPS, KODIAK,

0042-64377

BRACKET, ANTI-ROTATION 3-PORT R／U,

0042-64301

BOTTOM PLATE, PSM,

0042-64261

UPPER LID, PRISM 3.0,

0042-63990

RPS COOLING MANIFOLD, PRISM,

0042-63952

THERMAL BASE, PRISM- INCREASED DEFFUSION,

0042-63842

THERMAL LOWER LINER, LARGE BORE, SINGLE PORT, NO PRG, NO DIFFRENTIAL PUMPING, ALD,

0042-63840

THERMAL LOWER LINER, LARGE BORE, SINGLE PORT, NO PRG, NO DIFFRENTIAL PUMPING, ALD,

0042-63832

SPACER, COMMON LID, FLOATING, PEALD,

0042-63831

SPACER, COMMON LID, FLOATING, PEALD,

0042-63738

PLATE, PUMPING LPCVD CHMBR W／2ND CHOKE,,

0042-63666

BRACKET, LID ALIGNMENT,RACKET, LID ALIGNMENT,

0042-63622

CENTER MANIFOLD, COOLED, GD MOD CLEAN, PRISM,

0042-63485

BASE PLATE, LID,

0042-63314

LINER REPACK, VOLTA WW,

0042-63281 THERMAL BASE, PRISM-V6,

0042-63281

THERMAL BASE, PRISM-V6,

0042-63280

FIXTURE, BENCH TESTING, FLEXURE,

0042-63227

UPPER LINER,

0042-63207

ACCESS PORT COVER, PLATED, CHAMBER ASSY, SIDE-1, MR1237, 300MM,

0042-63184

FLANGE, ENP, AR, EPI PRECLEAN 300MM,

0042-63120

GAS BOX, PRESS SETUP, PSM,

0042-63080

PUMPING PLATE, INVERTED THROAT, PEALD, S,

0042-62979

PURGE RING, SIDE2, CLEAR LID, BR,

0042-62975

PURGE RING,SIDE 1, CLEAR LID, BR,

0042-62960

MANIFOLD, CLEAR LID, BR,

0042-62939

MANIFOLD 1, IND RPS, PRISM,

0042-62882

VALVE MANIFOLD, S2, S4, IND RPS, PRISM,

0042-62881

VALVE MANIFOLD, S1, S3, IND RPS, PRISM,

0042-62461

LARGE CONTACT OPEN BLOCKER PLATE, PRECISION,

0042-62452

RF MATCH VERTICAL SUPPORT,

0042-62450

RF MATCH HORIZONTAL SUPPORT, REAR,

0042-62436

SUPPORTED FACEPLATE, FLAT WITH GROOVE, PEALD, K3,

0042-62343

RF COVER S2, CIP, TOP, PRODUCER PRECISION,

0042-62341

RF COVER S1, CIP, TOP, PRODUCER PRECISION,

0042-62330

PUMPING PLATE 300MM TWIN,

0042-62191

PUMPING RING BOTTOM, NO SPACER, CENTER SPT, POS B, MR1237,

0042-62190

PUMPING RING BOTTOM, NO SPACER, CENTER SPT, POS A, MR1237,

0042-62140

BRACKET, SLIDE TO MTG PLATE ADAPTER,

0042-62063

GROUND PLATE, REDUCED OD CATHODE, 3Z, VAC PORT, SIDE 2, PIONEER,

0042-61996

COLD PLATE, WIDER TOP COIL,300MM, HDP-CVD,ULTIMA-X

0042-61897

HEATER LEAK CHECK ADAPTOR, ALD, 300MM,

0042-61886

GROUND PLATE, REDUCED OD CATHODE, 3Z, VAC PORT, SIDE 1, PIONEER,

0042-61858

PLATE RF HOUSING MATCH MATCH,

0042-61712

BLOCK, ADJ SCREW MOUNT, OBM, I-SRD MIRRA,

0042-61691

TOP LINER PLATE, LINER- 1, MAT: AL 6061,

0042-61656

FRAME VERTICAL, REAR, OPTICAL FRAME, OBM,

0042-61655

FRAME VERTICAL, FRONT, OPTICAL FRAME, OB,

0042-61655

FRAME VERTICAL, FRONT, OPTICAL FRAME, OB,

0042-61654

TOP PLATE, OPTICAL FRAME, OBM, I-SRD MIR,

0042-61616

LASER MOUNT, OPTICS, OBM／METROLOGY, I-SR,

0042-61603

BRACKET; RIGHT COVER; SSW 300MM CVD,

0042-61583

PLATE, TRANSLATION ADJ, OPTICAL STAGE, O,

0042-61518

WAFER PEDESTAL, 150MM FLAT, OBM,

0042-61448

LID ASSY, MLS,

0042-61439

BKT v2, MTG SENSOR, HEATER ASSY, POLISHER,

0042-61393

RIGHT ADJUSTMENT BRACKET, BOTTOM PLATE,,

0042-61392

LEFT ADJUSTMENT BRACKET, BOTTOM PLATE, O,

0042-61176

FACILITY PLATE, 3 ZONE ESC, PIONEER,

0042-61165

HOUSING, PEDESTAL, OBM／METROLOGY, I-SRD,

0042-61028

MANIFOLD, LID PURGE, SSW, 300MM,

0042-60992

OUTPUT MANIFOLD, OPTION-2, ALD, VOLGA, PRECISION,

0042-60977

PUMPING RING, R2, R4, CFP, PSM,

0042-60917

PUMPING RING, R1, R3 CFP, PSM,,

0042-60901

LEVELING PLATE, CFP,PSM,

0042-60828

COVER, CH LID, CFP, PSM,

0042-60793

VALVE BLOCK, WATER MANIFOLD, DUAL TEMP HTR, 300MM CVD,

0042-60676

BLOCKER RING CARBON; 6X,

0042-60614

COVER, STEAM GENERATOR, HEATER ASSY, POLISHER,

0042-60612

BKT, MTG SENSOR AND RELIEF VALVE, HEATER ASSY, POLISHER,

0042-60591

OPTMIZED FLOW SUPPORT LINER, W／PLASMA HOLE，4.25 MAX GAP,ICP,

0042-60576

COVER, STEAM GENERATOR,HEATER ASSY, POLISHER,

0042-60414

INPUT MANIFOLD, CHAMBER, TOP, VOLGA B, P,

0042-60331

HHL-SHAFT-ACTIVE COOLING,

0042-60263

BKT, MTG SENSOR AND RELIEF VALVE, HEATER ASSY, POLISHER,

0042-60157

SPLITTER, GD MOD, PSM,

0042-60155

BRACKET, AC STACK STIFFENER,

0042-60077

PUMPING PLATE, INVERTED THROAT, BR,

0042-60046

END PLATE, CATHODE,

0042-55411

ADAPTOR, PLATEN ROTARY UNION, POLISHER,

0042-55223

SPINDLE INTERFACE PLATE, 3GAS FEEDS, MR1237,

0042-55221

DUMMY UPPER ELECTRODE, 450MM OD,

0042-54927

LID RING

0042-54914

EPP CURTAIN PURGE RING S2,,

0042-54913

EPP CURTAIN PURGE RING S1,

0042-54665

LID PLATE, TRILLIUM, DOUBLE ORING, ALD,,

0042-54664

DUAL MANIFOLD, 3-AMP, TRILLIUM,

0042-54660

DUAL MANIFOLD W／ EXTRA PORTS, SPIRAL SH, ALD,

0042-54642

BLOCKER PLATE RING CARBON,

0042-54636

RF MATCH VERTICAL SUPPORT,

0042-54583

FACE PLATE CLAMP,

0042-54515

INSERT SLIT VALVE 71 NOZZLE W／BAFFLE ACP,

0042-54505

CARRIER, SLD, SYM3GT,

0042-54155

MOD SPACER, CLEAN FEED, DUAL GAS SHD, PRODUCER GT,

AMAT产品

物料号

名称/工艺要求

物料号

名称/工艺要求

0042-54081

ADAPTER PLATE, PVT ALPHA MOUNTING,

0042-53990

INSULATOR FLAT PLATE, HBHT ESC, PIONEER X,

0042-53942

SHIELD, SELF-ALIGNING, ALUMINA PINS, 145MM SPACING, 300MM PVD VHF,

0042-53879

PEDESTAL SHAFT, CHILLER. PRECLEAN 300MM,

0042-53757

PUMPING RING BOTTOM, NO SPACER, POS B, MR1237,

0042-53756

PUMPING RING BOTTOM, NO SPACER, POS A, MR1237,

0042-53703

BOTTOM PLATE, OBM／METROLOGY, I-SRD MIRRA,

0042-53554

UPPER LINER,

0042-53491

ADAPTER, CENTER, LEGACY LID, DUAL RPS, CENTURA 300MM,

0042-53336

PUMPING PLATE, AL 6061-T6, AL2O3 COAT, 300MM UHD LPCVD,

0042-53092

THERMAL CHOKE PLATE S2 & S4, PSM 2.0,

0042-53091

THERMAL CHOKE PLATE S1 & S3, PSM 2.0,

0042-52842

RPS BYPASS MANIFOLD, PRODUCER PRECISION,

0042-52795

MTG RING, BOTTOM INNER SHIELD, HT MCXT, E2, 300MM,

0042-52696

BASE PLATE, HPC, C1,

0042-52684

PUMPING PLATE, INVERTED THROAT, 2.0, PSM,,

0042-52440

BASE PLATE, HBHT ESC, PIONEER X,

0042-52419

EPP ERASER AL PURGE RING S2,,

0042-52398

OUTPUT MANIFOLD, 4 FEED, S2, PRODUCER PRECISION,

0042-52397

OUTPUT MANIFOLD, 4 FEED, S1, PRODUCER PRECISION,

0042-52259

THERMAL CHOKE PLATE S2 & S4 GD, PSM 2.0,

0042-52258

THERMAL CHOKE PLATE S1 & S3 GD, PSM 2.0,

0042-52218

HOUSING,LEVELER,RIGHT,HEATER LIFT,

0042-52217

HOUSING,LEVELER,LEFT,HEATER LIFT,

0042-52102

INPUT MANIFOLD,CHAMBER BODY,PRODUCER G-GT,

0042-52042

EPP ERASER AL PURGE RING S1,

0042-51917

GAS BOX, CHAMBER LID CENTER FLOW CONTROL FRONTIER, PRODUCER GT,

0042-51670

CHAMBER BODY, 300MM EPI PRECLEAN,

0042-51568

BLANK OFF, CIP CHOKE PLATE, PSM,

0042-51559

THERMAL CHOKE PLATE S2 & S4, PSM 2.0,

0042-51558

THERMAL CHOKE PLATE S1 & S3, PSM 2.0,

0042-51491

TRAY, BOTTOM LINER,

0042-51443

PLATE II, RF MATCH, ICP SOURCE, PRODUCER 300MM,

0042-51350

BLOCK BOTTOM C-CLAMP, SIDE 2, SACVD 300MM PROD,

0042-51349

BLOCK BOTTOM C-CLAMP, SIDE 1, SACVD 300MM PROD,

0042-51313

CIP SUPPORT LINER, CLAMPED HEATER, 4.25＂ MAX GAP,

0042-51230

WATERBOX, SIDE 1, SPRIAL SH, LID HTR, ALD／CVD,

0042-51084

LID PLATE AFEOL CLEAN CHBR 300MM,

0042-51004

PUMPING PLATE, INVERTED THROAT, BR,

0042-50997

HEATED LID PLATE; SSW 300MM CVD,

0042-50992

OUTER HUB, LEVELING CAROUSEL, INDEXER,

0042-50989

CNTR HUB, LEVELING, CAROUSEL INDEXER,

0042-50766

GASLINE, GASBLOCK TO 4FOLD, PROCESS 2, M,

0042-50765

GASLINE, GASBLOCK TO 4FOLD, PROCESS 1, M,

0042-50713

SEALING RING,

0042-50694

ROBOT ACCESS FRAME, F25, DDP,

0042-50591

RPS SUPPORT ; HEATED LID ; SSW 300MM CVD,

0042-50583

POST, CAPACITOR II, ENCLOSURE, ICP SOURCE, PRODUCER 300MM,

0042-50533

STICTION BREAKING BLOCK,

0042-50508

FACILITY PLATE, 3 ZONE ESC, PIONEER,

0042-50400

TRAY, BOTTOM LINER, SYM3DX, 1PC,

0042-50392

ADAPTER RING, MOTORIZED SOURCE TILT, 300MM DPX,

0042-50220

CAP,TAPERED INSERT, DOUBLE SEAL, 300MM ALD,

0042-50135

STEM, FACILITY PLATE, CATHODE,

0042-50110

PUMPING PLATE, INVERTED THROAT, 2.0, PSM,

0042-50074

DUAL MANIFOLD, SPIRAL SH, LOMBARD, ALD,

0042-49930

MANIFOLD 1, PRISM,

0042-49879

GAS DISTRIBUTION PLATE, HT MCXT, E2, 300MM,

0042-49872

INNER SHIELD, LOWER, HT MCXT, E2, 300MM,

0042-49726

THERMAL CHOKE PLATE S2 & S4, PSM 2.0,

0042-49663

THERMAL CHOKE PLATE S1 & S3, PSM 2.0,

0042-49478

BASE PLATE, VIBRATION ISOLATION, 6.X FI IR V2,

0042-49221

THERMAL CHOKE PLATE, LID STACK,

0042-49193

TRAY, BOTTOM LINER, FULL ANO,

0042-49186

X TABLE,

0042-49082

PUMPING PLATE, AL 6061- NO COATING, 300MM UHD,

0042-48995

CHASSIS, FIXED CATHODE PUMPED BASE,

0042-48901

TRAY, BOTTOM LINER,

0042-48751

HEATING PLATE, CIP2 AND HYBRID TEST STACK,

0042-48728

CIP SPACER, 7 INCH, W／O TOP FLANGE, MAGNET ROTATION, PIONEER,

0042-48580

Y BASE,

0042-48575

XY TABLE,

0042-48332

HINGE ARM, LEFT, MORAGA 3,

0042-48331

HINGE ARM, RIGHT,,

0042-48112

ADAPTER, DIGITAL MODULE FULLSCAN-X LK3.0,

0042-48107

SEALING RING,

0042-48100

FACILITY PLATE, COOLED, MW, POS B, MR1237,

0042-47962

PUMPING RING, BOTTOM, POS B, MR1237,

0042-47917

BALL TRANSFER MOUNTING BLOCK, BACK RH, PSM,

0042-47908

BALL TRANSFER MOUNTING BLOCK, BACK LH, PSM,

0042-47710

COMBINED FPBP, KODIAK PM KIT,

0042-47707

BALL TRANSFER MOUNTING BLOCK, FRONT RH,

0042-47492

STICTION BLOCK, LOWER LID, PRISM,

0042-47490

GROUND PLATE, CATHODE LT

0042-47462

ADAPTER, AE TOP MOUNT, 300MM HDPCVD ULTIMA PLUS,

0042-47446

BLOCK,CENTER LID COUPLING, LEVELING BEAM, PRISM 2.0,

0042-47444

ALIGNMENT, CENTER LID COUPLING, LEVELING BEAM,PRISM 2.0,

0042-47435

STICTION BLOCK, CHAMBER BODY, PRISM,

0042-47326

BOWL, TOP MOUNT ROBOT, 20K,

0042-47233 FIXED CATHODE ,TOP LINER, INTERMEDIATE MESH, PIONEER,

0042-47055

PUMPING RING TOP, THERMAL BASE, 24X BOLT, NO JACK SCREW, MOX, 3＂ SINGLE PORT, MR1237,

0042-47025

ICP CAN SUPPORT SPACER, PIONEER,

0042-46933

PLATE, GANTRY TOP, FI IR V2,

0042-46932

SUPPORT BRKT, SEG 2, SIDE 1 SHEAR PLATE,

0042-46931

COLD PLATE, WIDER TOP COIL,300MM, HDP-CVD, ULTIMA-X,

0042-46872

UPPER LINER, HEATED,,

0042-46823

COOLING PLATE, R2-4,

0042-46747

PUMPING RING TOP,THERMAL BASE,SPIRAL,MOX,3‘’ SINGLE PORT,MR1237

0042-46536

TRAY, BOTTOM LINER,

0042-46500

BLOCK,SEISMIC ON SAFETY BRACKET, PSM,

0042-46498

BLOCK,SEISMIC ON SAFETY BRACKET, PSM,

0042-46420

LIFT MOUNTING PLATE, BIASED CATHODE, 300,

0042-46415

PUMPING PLATE INVERTED THROAT, 2.0, PSM,

0042-46350

BALL TRANSFER MOUNTING BLOCK, FRONT LH, PSM,

0042-46303

BOTTOM PLATE, PSM,

0042-46230

TRAY, BOTTOM LINER,SYM3DX, 1PC,

0042-46052

PEDESTAL ADAPTER, CHILLER, ENDURA2, 300MM,

0042-46007

SUPPORTED OPEN FACEPLATE, PRECISION,

0042-46005

SPLITTER, GD MOD, PSM

0042-45952

SHAFT, PEDESTAL, CIENA, PRODUCER GT,

0042-45951

HUB, ROD PURGE, PEDESTAL, CIENA, STIFF LIFT,

0042-45930

THERMAL CHOKE PLATE S2 & S4, PSM 2.0,

0042-45864

PUMPING RING TOP, PLASMA-A, 3＂ SINGLE PORT,

0042-45812

COOLING HUB ASSY, SHORT SHAFT HEATER, DPC, PRODUCER GT,

0042-45800

THERMAL CHOKE PLATE S1&S3, PSM 1.75,

0042-45688

PUMPING PLATE, INVERTED THROAT, CIP1 2.0, PSM

0042-45657

CHASSIS, FIXED CATHODE C3ZONE,

0042-45610

STANDOFF 4, LIFT PIN PSM,

0042-45607

STANDOFF 1, LIFT PIN, PSM,

0042-45603

PUMPING PLATE, INVERTED THROAT, PRISM 2.0,

0042-45459

TOP HEATER BASE COOLING HEAD, TRILLIUM TI, CVD／ALD,

0042-45248

ADAPTOR PLATE, RAISED LID, DUAL SEAL. DNP, MCVD 300MM,

0042-45177

THERMAL CHOKE PLATE, PRISM 1.75 CIP

0042-45110

INNER RING,LID,40MM GAP,

0042-44978

BASE PLATE,409 LAMPS,

0042-44977

THERMAL BASE, MVA, SPIRAL, MOX, 3＂ SINGLE PORT, MR1237

0042-44948

FACILITY PLATE,

0042-44946

PUMPING PLATE, INVERTED THROAT, PSM

0042-44822

THERMAL CHOKE PLATE, PRISM 1.75 CIP

0042-44735

BASE PLATE, HPC C2,

0042-44248

FACILITY PLATE, COOLED, MW, POS A, MR1237,

0042-44176

PUMPING RING BOTTOM,OPEN GAS PLENUM, POS,

0042-44151

MANIFOLD, SPIRAL LID, N-METAL, ALD

0042-44112

WATERBOX, SC SPIRAL SH, ALD

0042-43631

WAFER LIFT, FI IR V2,

0042-43554

BRACKET, DIFFUSER, FI IR V2,

0042-43457

ADAPTOR PSM

0042-43110

BLOCK BOTTOM C-CLAMP SACVD 300MM PROD,

0042-43109

BLOCK BOTTOM C-CLAMP SACVD 300MM PROD,

0042-43070

CHASSIS, CATHODE, SILVERADO,

0042-42846

SLIT LINER DOOR,HOLDER, FALCON,

0042-42804

BLOCKER RING CARBON; 6X,

0042-42662

BR BP RING; 20X,

0042-42539

PUMPING CHANNEL SIDE 1, UC4 LINER SACVD, PRODUCER SE／GT,

0042-42500

PUMPING CHANNEL, SIDE2, UC4 LINER, SACVD PRODUCER SE／GT,

0042-42408

WRIST PLATE LOWER EE 2200X2500MM DVR 55K TFE,

0042-42368

SIDE PLATE,

0042-41748

HEATED HIGH SPACER,SHD TO CHAMBER LID,PRODUCER GT,

0042-41458

DUAL MANIFOLD, SPIRAL LID,CVD／ALD,300MM

0042-41337

HEATED FACEPLATE BLANK,

0042-41035

WRIST PLATE UPPER EE DVR 2200X2500MM 55K TFE,

0042-40840

PUMPING RING, PRISM CF

0042-40839

PUMPING RING, PRISM CF

0042-40837

PUMPING RING TOP, THERMAL BASE, MOX, 3＂ SINGLE PORT, MR1237,

0042-40836

PUMPING LINER LOWER,THERMAL, MOX, 3＂ SINGLE PORT, MR1237,

0042-40686

OUTPUT MANIFOLD, 4 FEED, PRODUCER PRECISIONS1,

0042-40580

BR BP RING

0042-40362

CLAMP, STRUCTURED CABLE, PART 1, FI IR V2,

0042-40005

ADAPTER, PARAGON RPS,

0042-39876

PUMPING PLATE, BASIS

0042-39858

BRACKET, VALVE LIFT

0042-39719

OUTPUT MANIFOLD, 4 FEED, PRODUCER PRECISION,

0042-39511

CAP, TAPERED INSERT, COATED, DOUBLE SEAL, DYLAN

0042-38817

TOPT IMIZED FLOW, GASRING, 16 INCLINEDINOZZLE EXIT, ICP PIONEER

0042-38708

SUPPORT LINER, W／ . PLASMA HOLE, 4.25 MAX GAP, ICP

0042-38653

INLET ADAPTER

0042-38607

UPPER LID, BASIS

0042-38590

PUMPING LINER, UPPER,,

AMAT产品

物料号

名称/工艺要求

物料号

名称/工艺要求

0042-38427

RPS SUPPORT COLUMN F, GD MOD, PRISM,

0042-38426

RPS SUPPORT COLUMN, GD MOD, PRISM,

0042-38425

MOUNTING FLANGE, SPLITTER, GD MOD, PRISM,

0042-38335

TOP PLATE, FEED THRU

0042-38277

THERMAL CHOKE PLATE,BASIS

0042-38252

LID,HINGED,CHAMBER,LARGE ELECTRODE,PRODUCER PRECISION G-GT

0042-38223

SHIELD, SELF-ALIGNING, ALUMINA PINS, TEXTURED,300MM PVD

0042-37974

PLATE, ROTATION STAGE MOUNTING, 6.X FI IR,

0042-37952

INSERT, AL LID, 300MM,

0042-37857

SLIT LINER DOOR, HOLDER,

0042-37663

PUMPING RING, PRISM C&F

0042-37639

BRACKET, CHAMBER MOUNTING, PIONEER,

0042-37585

INPUT MANIFOLD,CHAMBER BODY,PRODUCER G-GT

0042-37582

RING, PURGE, EPP

0042-37535

RPS RING

0042-37531

BAFFLE, BOTTOM PURGE, PSM,

0042-37340

PLATE,HINGE,ACTUATOR BTM,

0042-37254

RPS RING

0042-37245

BASE LOWER CATHODE 3 ZONE ESC

0042-37145

KF FLANGE, BELLOW,

0042-37043

UPPER LID, PRISM 2.0,

0042-36977

CAP,TAPERED INSERT,DOUBLE SEAL,300MM ALD

0042-36783

PUMPING PLATE, INVERTED THROAT, BR,

0042-36736

SEALING RING

0042-36551

LINER, BOTTOM,

0042-36543

BASE LOWER CATHODE 3 ZONE ESC

0042-36431

INNER SHIELD, CVD-CO, 300MM,

0042-36319

LINER, TSGD MK2, SINGLE SLIT,

0042-36308

CATHODE SLEEVE, ORION FIXED CATHODE,

0042-36233

S／F SUPPORT SV SIDE 25KPXI W／O FLOW BLOC,

0042-36197

BR BP RING

0042-36031

PUMPING RING, 180MIL, INVERTED THROAT, RPS DIVERT, BR

0042-36028

RPS RING, RPS DIVERT PATH, BR

0042-36026

PUMPING PLATE,INVERTED THROAT, PRISM

0042-36022

LID LINER, AXSWLL, FALCON,

0042-36013

CAP,HOUSING,UPPER THETA DRIVE, PRISM,

0042-35892

CHASSIS, FIXED CATHODE C3ZONE,

0042-35803

DEC PLENUM PLATE, ON, 90-125 CB39 HD16, PRECISION S2

0042-35802

DEC PLENUM PLATE, ON 90-125 CB39 HD16, PRECISION

0042-35778

SPACER, 4.75 INCH, W／O

0042-35775

FLAT PLATE, SHOWERHEAD,NON-PROTRUDED, PIONEER

0042-35732

SUPPORT LINER, CLAMPED HEATER, 4.25＂ MAX GAP,,

0042-35691

ADAPTER, SLEW DRIVE HDX,

0042-35489

LID PLATE, CVD CO, 300MM

0042-35488

PUMPING LINER, VSW

0042-35468

X TABLE,

0042-35467

XY TABLE,

0042-35466

Y BASE,

0042-35465

Z BASEPLATE, PRISM INDEXER,

0042-35444

COOLING HUB, SA LIFT PRISM

0042-35442

GAS RING, 16 INCLINED NOZZLE,ICP C&P,PIONEER,

0042-35439

ICP CAN SUPPORT SPACER, PIONEER

0042-35417

ADAPTER, BOTTOM LAUNCH, G11 DEGAS, 300MM,

0042-35353

PLATE, TERMINAL BLOCK, 300MM, PVD

0042-35273

OUTER HUB, LEVELING CAROUSEL, INDEXER

0042-35234

END PLATE, REAR,

0042-35187

BASE PLATE, HPC, C1

0042-35179

DUAL MANIFOLD W／ EXTRA PORTS, SPIRAL SH, ALD

0042-35114

L MANIFOLD, SSW, LEGACY LID, DUAL RPS, C

0042-35046

DUAL MANIFOLD W／ EXTRA PORTS, SPIRAL SH, ALD,

0042-35045

PLATE, TOP, VOLTA CLEAN CVD 300MM,

0042-34870

LID PLATE, LEGACY LID, DUAL RPS, CENTURA 300MM

0042-34864

UPPER LINER, HEATED,40MM GAP,

0042-34824

ADAPTER PLATE, SOURCE

0042-34795

BLOCK, PYRO COOLING, ULLM, EPI LUX,

0042-34753

CENTER MANIFOLD, LEGACY LID, DUAL RPS, C

0042-34645

EDGE CLAMP, COATED,10MM SPACER, MW, MR1237

0042-34616

CAVITY BLOCK, FRONTIER, PRODUCERT GT,

0042-34590

LAMP MOUNTING BLOCK 1, LOWER LAMP BASE, BONHAM,

0042-34560

LAMP MOUNTING BLOCK II, LLM, BONHAM,

0042-34333

BLOCK, GAS INTEGRATION, LID, MR1237

0042-34328

BLOCK, GAS INTEGRATION, CHAMBER, MR1237

0042-34314

TOP PLATE, DUAL RPS，SSW, PRODUCER 300MM,

0042-34271

ADAPTER, COLLIMATOR, IR,

0042-34266

PIVOT PLATE SUPPORT BLOCK

0042-34192

PLATE, EXH CAVITY COVER, CPI CVD TWIN

0042-34039

PUMP RING, BOTTOM,MEDIUM BORE,MR1237

0042-33987

PUMPING PLATE, 1 PIECE REPACK DZ+IU HTR, iW2,

0042-33821

FACILITY PLATE, 3 ZONE ESC, PIONEER

0042-33671

HOUSING XESC VOLARIS

0042-33659

RPS MANIFOLD, BOTTOM,DNP, CVD, ENDURA

0042-33595

CLAMP, GAS INJECTION, PVD 300MM

0042-33461

MANIFOLD, INLET, RPS, 300MM TXZ PRODUCER,

0042-33442

BRIDGE; DUAL RPS SSW; PRODUCER 300MM,

0042-33332

DUAL MANIFOLD, SPIRAL SH, LOMBARD, ALD,

0042-33299

LID PLATE, DUAL RPS, SSW, PRODUCER 300MM,

0042-33238

ASSEMBLY, THERMAL,SHOWERHEAD BASE,MOX,301 PUMP,V2.4,LARGE OD,SPLIT PLENUI

0042-33155

LID, OBM CHAMBER, IMG

0042-33047

CHAMBER LINER,VOLARIS 2,300mm

0042-33023 ACCESS PORT COVER,PLATED, CHAMBER ASSY,MR1237, 300MM

0042-32962

NNER RING, LID

0042-32807

BRACKET, DUAL TC MOUNTING, VIA

0042-32794

PUMPING RING, V2.4, SINGLE BORE, TOP, COATED, ALD,

0042-32743

SPACER, 4.75 INCH, W／O TOP FLANGE, MAGNET ROTATION,PIONEER

0042-32672

SPACER, 7 INCH, W／O TOP FLANGE, MAGNET ROTATION RIONEER

0042-32527

SLIT LINER DOOR, HOLDER

0042-32516

RPS CLEAN GAS LID INSERT S2,PRODUCER PRECISION.

0042-32493

BRACKET, SENSOR, AWS,PRODUCER 150MM／200MM,

0042-32428

PUMPING PLATE, 120MIL,INVERTED THROAT, BR

0042-32358

ADAPTER, SIDE, NW50,LEGACY LID, DUAL RPS,CENTURA 300MM,

0042-32266

SENSOR MOUNTING FRAME,LCF, PRODUCER 150MM／200MM

0042-32230

MOUNT,BLADE BRACKET, GRIPPER,CLEANER,

0042-32203

CARRIER, SINGLE AXIS LIFT, PSM, 300MM,

0042-32198

TRAY, BOTTOM LINER,

0042-32121

HUB LF, GIMBAL, DZ HTR, WCVD, 300MM,

0042-32116

RPS MANIFOLD, TOP, DNP,CVD, ENDURA

0042-32114

TOP HEATER BASE, DNP,CVD, ENDURA

0042-32068

SLIT LINER DOOR, HOLDER

0042-31999

OUTPUT MANIFOLD,S2,LARGE ELECTRODE,PRODUCER G-GT

0042-31983

PUMPING PLATE, 120MIL, INVERTED THROAT, BR

0042-31963

COOLING FLANGE, RPS,PRODUCER G-GT

0042-31946

ADAPTER, CENTER, LEGACY LID, DUAL RPS,CENTURA 300MM,

0042-31920

OUTPUT MANIFOLD,S1,LARGE ELECTRODE,PRODUCER G-GT

0042-31724

BRACKET HOIST MOUNTING SKINS

0042-31499

LID, HINGED, CHAMBER,LARGE ELECTRODE,PRODUCER PRECISION G-GT

0042-31403

RPS CLEAN GAS LID INSERT,PRODUCER PRECISION

0042-31348

COOLING HUB ASSY,SHORT SHAFT HEATER,DPC,PRODUCER GT

0042-31281

BRACKET PILLOW BLOCK , 300MM,

0042-31234

BASE LOWER CATHODE 3 ZONE ESC

0042-30915

PUMPING PLATE, 1 PIECE, REPACK, DZ+IU HTR,

0042-30786

HOUSING,LEVELER,LEFT,HEATER LIFT

0042-30785

HOUSING,LEVELER,RIGHT, HEATER LIFT,

0042-30735

RF MATCH VERTICAL SUPPORT,

0042-30641

BASE PLATE, LID,

0042-30600

STICTION BLOCK, CHAMBER BODY, PRISM,

0042-30588

COVER, TRIPLET LENS, IR,

0042-30586

MTG PLATE, IEP SNR HEAD, IR,

0042-30585

MTG PLATE, CAMERA, IR,

0042-30535

BASEPLATE, LID ENP COATED, 300MM PRECLEAN,

0042-30502

MANIFOLD, SPIRAL LID, N-METAL, ALD

0042-30185

CAP,TAPERED INSERT, DOUBLE SEAL, 300MM ALD

0042-29979

HDP PROFILE DOME. NO.WATER CHANNEL BB RPS PIONEER

0042-29900

BLANKOFF PLATE, CAROUSEL INDEXER,

0042-29791

STOPPER BRACKET,DAMPING LEFT,

0042-29789

STOPPER BRACKET，DAMPING RIGHT,

0042-29776

FLANGE, SPACER MOUNT PLATE, PIONEER,

0042-29764

COOLING HUB, HEATER LIFT ASSY, PRODUCER GGT

0042-29740

BRACKET, BACKPLATE EXTENSION, PRODUCER G-GT

0042-29637

CLAMP, SUPPORTED FACE PLATE, PRISM,

0042-29437

PUMPING RING, TOP, PPPLASMA, LARGE BORE,MR1237

0042-29233

BASE PLATE, HPC, C2,

0042-29193

BLOCK, GAS INTEGRATION, CHAMBER, MR1237

0042-29174

PLUG, UNIVERSAL,SHIPPING, HTR LIFT KIT

0042-29143

BLOCK, GAS INTEGRATION,CHAMBER

0042-29134

GAS RING, SYM 64 PORT

0042-29055

HUB, ROD PURGE,PEDESTAL, CIENA, STIFF LIFT

0042-28517

SYM3D 2.0 HEATED LINER 40MM

0042-28312

BRACKET, BACKPLATE EXTENSION, PRODUCER G-GT

0042-28255

BRACKET,LID, LID CRANK,300 MM, SACVD

0042-28253

FUNNEL, HVM HYBRID LIDCOATED. WATSON, ALD

0042-28234

HINGE BASE, RIGHT

0042-28233

HINGE BASE, LEFT

0042-27987

Z BACKBONE, INDEXER ROBOT,

0042-27755

TRAY,BOTTOM LINER

0042-27748

BAFFLE, BOTTOM PURGE, PRISM

0042-27689

SUPPORT LINER, CLAMPED HEATER, 4.25＂ MAX GAP

0042-27635

PUMPING RING BOTTOM, OPEN GAS PLENUM, POS A

0042-27553

SENSOR RAIL, BIAS PEDESTAL, SIENA PRODUCER GT,

0042-27504

PUMPING PLATE,INVERTED THROAT, PRISM

0042-27390

SHIELD, SELF-ALIGNING,ALUMINA PINS, TEXTURED,300MM PVD

0042-27105

FACILITY PLATE, COOLED,MW, MR1237

0042-27046

UPPER LID, PRISM,

0042-26892

SPACER BTM MNT. 7 INCHW／O TOP FLANGE,MAGNET ROTATION, PIONEER

0042-26803

FACILITY PLATE, 3 ZONE ESC, PIONEER

0042-26706

MOUNTINGBRACKET,SIDE2,LIDENCLOSURE

0042-26705

MOUNTINGBRACKET,SIDE1,LIDENCLOSURE

0042-26589

LIFT PLATE, PROCESS KIT, PRISM,

0042-26432

CAP, SERVICE, CAROUSEL NDEXER,

AMAT产品

物料号

名称/工艺要求

物料号

名称/工艺要求

0042-26384

OUTPUT MANIFOLD, S2, LARGE ELECTRODE, PRODUCER G-GT

0042-26383

OUTPUT MANIFOLD, S1, LARGE ELECTRODE, PRODUCER G-GT

0042-26373

SUPPORT LINER, FIXED CATHODE

0042-26264

PLATE, MNTG, AUTOMATCH SIDE 1, PRODUCER SE／GT,

0042-26263

PLATE, MNTG, AUTOMATCH SIDE 2, PRODUCER SE／GT,

0042-26067

LID PLATE, SPIRAL ALD, 300MM PGT

0042-25990

TOP PLATE ASSY

0042-25657

XY TABLE

0042-25433

BRACKET, CHAMBER MOUNTING, PIONEER

0042-25400

SIDE COVER, CARRIER BRACKET,

0042-25152

HOUSING, BELLOWS, SLIT VALVE, MSC FCVD PRODUCER GT

0042-25060

GAS RING. SPACER TOP FLANGE PIONEER

0042-25001

INNER SHIELD, SHOWER, VOLARIS 2,300MM,

0042-24884

SIDE INJECTION RING, PHOTOMASK TETRA II

0042-24760

BLOCK, N2 CNTL PANEL SUPPORT, LK-CATALYST

0042-24736

CHASSIS, FIXED CATHODE C3ZONE

0042-24630

BACKBONE V1 - IWR - PRISM,

0042-24326

BASE LOWER CATHODE 3 ZONE ESC

0042-24324

CLAMP RING, CHAMBER LINER, Y2O3 COAT, DPX ENDURA 300MM

0042-24214

FLAT PLATE SHOWERHEAD ,NON-PROTRUDED,PIONEER

0042-24208

COVER, BASE PLATE,UPPER INJECT, EPI 300MM

0042-23889

BASE,HINGE,SOURCE,DPX ENDURA 300MM

0042-23865

SPINDLE INTERFACE PLATE,3GAS FEEDS, CONTINUUM

0042-23838

FLAT PLATE SHOWERHEAD ,PROTRUDED,PIONEER,

0042-23741

GROUND PLATE, CATHODE LT

0042-23698

HDPCVD DOME BB, RPS, PIONEER

0042-23668

ADAPTER PLATE, LEAK CHECK CHAMBER, STATION ASSY, MR1237

0042-23511

FUNNEL, HVM HYBRID LID,COATED, WATSON, ALD,300MM

0042-23494

BRKT,EXHAUST PURGE,RFP EPI

0042-23453

ADAPTOR PLATE, RAISED LID, DUAL SEAL. DNP, MCVD 300MM,

0042-23442

PUMPING RING, LARGE OD,SPLIT PLEMUN LARGE BORE,V2.4,ALD

0042-23396

PUMPING LINER, CVD Si,ALD, 300 MM

0042-23312

ADAPTER, WATER-COOLED,STD PVD, 300MM ENDURA2

0042-23299

INTEGRATED DOME, 96，HOLES, PROTRUDED,PIONEER

0042-23238

GAS MANIFOLD, LID, METAL, DUAL FEED, VOLTA AL

0042-23110

LINER, NON PPM, PREC, CLAMP, KODIAK UX,

0042-22821

FO ADAPTER, 10MM

0042-22762

CHASSIS, CATHODE,COMMON

0042-22626

CAP, TAPERED INSERT,COATED, DOUBLE SEAL,DYLAN

0042-22438

BRACKET, VAC CHUCK MOUNT, 300 MM ALD CHAMBER.

0042-22365

MANIFOLD, OUTLET,VOLTA CLEAN

0042-22364

MANIFOLD, INLET, VOLTA CLEAN

0042-22322

HOOP RING, ENHANCED INTERFACE, SWLL A, EP,CENTURA AP,CLAYTON

0042-22266

HOOP RING, ENHANCED INTERFACE, SWLL B, EP,CENTURA AP,CLAYTON

0042-22122_02-SP

COUPON, INTERSECTING GUNDRILL WITH SECTI,

0042-22122

DUAL MANIFOLD, SPIRAL,SH ALD

0042-22038

SIDE MANIFOLD,GD MOD Clean,PRISM

0042-21874

ADAPTER, #205 ORING TO NW16,LOMBOARD,ALD

0042--21873

WATERBOX, SIDE 1,SPRIAL, SH,ALD

0042-21855

RF ELECTRODE FEOL SMALL RF 300MM

0042-21847

MIN CONTACT SINGLE BLOCKER PLATE, PRECISION PATTERNING,

0042-21844

CLAMP, VFT, LOWER LID

0042-21754

HINGE BRACKET, SIDE 2, CH BODY, PRODUCER G-GT

0042-21753

HINGE BRACKET , SIDE 1,CHBODY, PRODUCER G-GT

0042-21730

PUMPING CHANNEL, NICKEL PLATED, NO BEAD BLAST, SICONI, PRODUCER GT

0042-21663

&quotMIXING MANIFOLD,SRP,

0042-21649

BASEPLATE, CRION

0042-21421

BLADE, STEPPED, AWS ROBOT, PRODUCER 150MM

0042-21379

ORIFICE BACKING PLATE 2, GD MOD, PSM,,

0042-21342

ORIFICE BACKING PLATE, 2M, GD MOD, PSM,,

0042-21341

ORIFICE BACKING PLATE,M, GD MOD, PSM,,

0042-21295

ORIFICE HOLDER PLATE,M, GD MOD, PSM,

0042-21294

ORIFICE HOLDER PLATE, 2M, GD MOD, PSM,

0042-21291

SUPPORT LINER, CAN COVER LID STACK, RADION,

0042-21290

ORIFICE HOLDER PLATE 2, GD MOD, PSM,

0042-21253

ORIFICE BACKING PLATE, GD MOD, PSM,,

0042-21227

ORIFICE HOLDER PLATE,GD MOD, PRISM,

0042-21142

HOLDER WAFER LEFT LLK PRODUCER 200MM／150MM

0042-21141

HOLDER WAFER RIGHT LLK PRODUCER 200MM／150MM

0042-21060

BLANK-OFF TRANSFER CHAMBER PC FACET CONTINUUM

0042-21001

RPS MANIFOLD, BOTTOM, DNP, CVD, ENDURA,

0042-20629

THERMAL CHOKE PLATE,PRISM

0042-20601

EDGE RING WITH GRD LOOPS, ALUM／SST HTR

0042-20307

BRACKET, PA MTG CROSSBAR, 5.3 AT FI,

0042-20101

I-BLOCK INSEPARABLE ASSY, FI-SDL-2P-3PL-FO,

0042-20024

PUMPING RING BOTTOM,OPEN GAS PLENUM, POS A

0042-20023

PUMPING RING TOP, PLASMA-A, 3" SINGLE PORT

0042-19727

THERMAL PUMPING RING,LARGE BORE, SINGLE PORT, NO PRG, ALD

0042-19725

PUMPING RING TOP,THERMAL, 3＂ SINGLE PORT, ALD

0042-19570

CLAMPED ECR PLATE, 300MM TITAN HEAD

0042-19565

Adapter, Volaris,300MM

0042-19379

LID, CLDWN CH, ENDURA FULL OBM

0042-19277

HUB ASSY, CAROUSEL,Offset Paddle

0042-18844

PLATE LID WCVD 300MM

0042-18432

PUMPING PLATE, 1 PIECE, VSW

0042-18138

DEC PLENUM PLATE, ON, 90-125 CB39 HD16, PRECISION S2,

0042-18100

SPACER, 7 INCH, W／O TOP FLANGE, MAGNET ROTATION, PIONEER

0042-18075

PLATE LID WCVD 300MM,

0042-18073

PUMPING LINER, VSW

0042-17802 LINER, VT.WCVD

0042-17786

DEC PLENUM PLATE, ON 90-125 CB39 HD16, PRECISION,

0042-17695

MANIFOLD, LID GAS／WATER INLET, MOTIN 300MM,

0042-17692

HINGE BASE, RIGHT

0042-17691

HINGE BASE, LEFT

0042-17690

HINGE ARM, RIGHT

0042-17689

HINGE ARM, LEFT,

0042-17556

LID PLATE, SWLL B, CENTURA AP, CLAYTON,

0042-17554

CENTURA AP SWLL B CHAMBER, CLAYTON,

0042-17517

GROUND PLATE, CATHODE, AUTOMATED SIC MOVEMENT

0042-17445

CHASSIS, CATHODE,AUTOMATED SIC MOVEMENT

0042-17258

PLASMA PUMPING RING, LARGE BORE, BOTTOM

0042-17218

SPACER , LID STACK

0042-17217

GROUND PLATE, CATHODE, 3Z, VAC PORT, SIDE 2, PIONEER

0042-17216

GROUND PLATE, CATHODE, 3Z, VAC PORT, SIDE 1, PIONEER

0042-16916

BLANK OFF, SiGe RPS ADAPTER, SRP, PRODUCER GT,

0042-16717

I-BLOCK INSEPARABLE ASSY, FI-2PL,

0042-16377

WRIST HOUSING, DUAL SIDE WAFER POLISH,

0042-16326

CLAMP RING, CAN COVER

0042-16171

BLOCKER PLATE, SINGLE ZONE, PRECISION,

0042-15834

BLOCK, FACILITY SUPPLY RETURN, BR2,

0042-15706

OUTPUT MANIFOLD, DRC,RPS ISO, PRECISION,

0042-15671

INSERT, VAC, DWLL-Y19, CENTRIS

0042-15666

INSERT, ATM, DWLL Y19, CENTRIS

0042-15464

UPPER SPACER,SYMMETRIC, SWLL A,CENTURA AP, CLAYTON

0042-15435

UPPER SPACER,SYMMETRIC, SWLL B,CENTURA AP, CLAYTON

0042-14723

ADAPTER CLNG RPS ISO VLV PRODUCER,

0042-14623

BLOCK, TRACK BEARING, ROBOT TRACK ASSY

0042-14395

WRIST HOUSING

0042-14117

SUPPORT LINER,VIEWPORT SHIELD, RADION

0042-13746

CABLE WRAP, SHOULDER AXIS, WAFER HDLG. ROBOT

0042-13646

SHOULDER GEAR MOUNT

0042-13645

SLEEVE WRIST DRIVE SHAFT

0042-13346

BRKT, VLV MOUNTING, MN EXHAUST, CH Y AND X,RFP ERI

0042-13343

BRKT, MANO METER TREE, RFP EPI

0042-13130

DUAL MANIFOLD, SPIRAL LID, CVD／ALD, ENDURA 300MM

0042-13067

WATERBOX, SPRIAL SH,CVD／ALD, ENDURA, 300MM

0042-12906

BLOCK, NOZZLE HOLDER, ETCH,

0042-12624

SUPPORTED FACEPLATE,FLAT WITH GROOVE,

0042-12310

AL-RING, NON PPM, PREC, CLAMP

0042-12112

GASBOX, SYMMETRIC FEED ON UX, PRODUCER PRECISION,

0042-11984

HOSE BRACKET, HOSE TRAY

0042-11731

MANIFOLD, DUAL FT,PRODUCER HYDRA 300MM

0042-11730

UPPER INLET MANIFOLD,300MM ALD TIN

0042-11723

LOWER HOUSING, CATHODE, SIDE 2, PIONEER

0042-11721

LOWER HOUSING, CATHODE, SIDE 1, PIONEER

0042-11506

CHAMBER LID,CLEAN, E2,300MM

0042-11500

TOP PANEL, GAS PANEL ENCLOSURE

0042-11221

LID PLATE, METALS

0042-11045

LID PLATE, TRILLIUM, DOUBLE ORING, ALD, 300MM

0042-10963

CAP, TAPPERED HOUSING, DOUBLE SEAL,300MM ALD

0042-10962

CAP,TAPERED INSERT,DOUBLE SEAL,300MM ALD

0042-10885

ELEVATOR, CATHODE, SIDE 1, PIONEER,

0042-10880

DRIP TRAY, AC BOX ENCLOSURE, TOP PANEL, DZ PEDESTAL

0042-10803

BLOCKER PLATE a-Si, DUAL ZONE, SINGLE PLATE, PRECISION,

0042-10086

LINER, SIDE PUMPING,PREC

0042-10070

BLOCK, LINEAR GUIDE MOUNTING

0042-09916

GAS BOX 100MM／200MM WSI

0042-09805

MIN CONTACT SINGLE BLOCKER PLATE, PRECISION PATTERNING,

0042-09709

P DOME 12.5, CLEAN FEED, ETERNA FCVD,PRODUCER GT

0042-08789

HALF-SHAFT, COATED AL

0042-08782

GROUND SHIELD, COATED AL

0042-08341

ADAPTER CLNG RPS ISO VLV PRODUCER,

0042-08143

TRI CUT RING, CH MOUNTED, PRODUCER PRECISION,

0042-07683

HOLDER, WAFER PIN, GERSHWIN

0042-06842

LINER, SLIT DOOR, PIONEER

0042-06501

SUPPORT LINER, CLAMPED HEATER, 4.25" MAX GAP

0042-06259

BASE PLATE, CHAMBER,300MM EPI

0042-06257

CLAMP RING, LOWER, 300MM EPI

0042-05418

LID, HYBRID WITH PUMPING CHANNEL, ALD,300MM

0042-05264

SUPPORT LINER, CLAMPED HEATER, RADION,PRODUCER GT

0042-05011

NUT PLATE PIN LOWERSHIELD, AL 7075

0042-05006

NUT PLATE REAR PINLOWER SHIELD, AL 7075

0042-04897

RENAY ANDERSON-GUY

0042-04460

SHIELD, HOLDER

0042-04270

HOOP, LIFT, PRE-CLEAN, ACP 300MM

0042-03401

SPACER, BOTTOM, CRANK, 300 MM, SACVD

0042-03115

LINER, MK2, SINGLE SLIT,

0042-02846

BLANKOFF, SGD LINER,FILLED GAP

AMAT产品

物料号

名称/工艺要求

物料号

名称/工艺要求

0042-02000

MIN CONTACT SINGLE BLOCKER PLATE, PRECISION PATTERNING,

0042-01810

SUPPORTED LINER, 3X SV,LARGE PED,CH MOUNTED,PRODUCER PRECISION

0042-01156

BASE,HEATER MOUNT,VIA PRE-CLEAN,ACP 300MM

0042-00927

MOUNT BLOCK, LINEAR GUIDE, WAFER LIFT,

0042-00881

CARRIER DPC LIFT PRODUCER,

0042-00636

BLOCKER PLATE a-Si, DUAL ZONE, SINGLE PLATE, PRECISION,

0042-00466

ELEVATOR, YTTRIA COATED, MOVING CATHODE,SIDE 2

0042-00374

SHAFT, TILT MECHANISM

0042-00085

LOAD LOCK CHAMBER,PRODUCER GT, 6XN FI

0041-99928

FACILITY PLATE, 3 ZONE ESC, PIONEER

0041-99610

FIN, LIFT, VIA,PRE-CLEAN,,ACP 300MM

0041-99609

HOOPLIFT,VIA PRE-CLEAN,ACP 300MM

0041-99471

LID. COLLIMATOR MOUNTING, CHB

0041-99470

LID, Outer Ring

0041-99465

COVER, COLLIMATOR MOUNTING, CHB

0041-99302

LINER, NON PPM, PREC, CLAMP, KODIAK UX

0041-98834

GROUND PLATE, NI FREE, CATHODE, AUTOMATED SIC MOVEMENT,

0041-97991

FRONT COVER, CHAMBER LID

0041-97271

＂CATHODE, OUTER, HORIZONTAL ORINGS, MK2, AERIS-S＂,

0041-97163

BRACKET,TRACK COVER,ROBOT CMP

0041-96642

LINER, LOWER CATHODE,C7

0041-95822

BAFFLE,ESC ASSEMBLY,RADION PRODUCER GT

0041-95196

SUPPORTED FACEPLATE, ROUGHEN DOVETAIL GROOVE, TEOS, LARGE ELECTRODE, PRODUCER PRECISION,

0041-94854

LID HINGE,80 DEG, SIDE 1,300MM PRODUCER GT

0041-94853

LID HINGE,80 DEG, SIDE 2,300MM PRODUCER GT

0041-94356

BLANK-OFF, RPS／RPS FEEDTHRU, RPO2

0041-94295

BRACKET, THREE GAS LINES CLAMP

0041-93930

ADAPTER CHAMBER TO ISO VALVE SACVD PRODUCER SE GT

0041-93477

COOLING RING BASE, LEFT, PRODUCER XP,

0041-93150

GROUND PLATE, CATHODE,AUTOMATED SIC，MOVEMENT

0041-93063

COVER EXHAUST DUCT, 6＂ FLANGE TO 4＂ COLLAR,PRODUCER GT

0041-92415

LEFT SIDE PLATE, LID LIFTER,PRODUCER ACP,

0041-92414

PLATE, DOME LID LIFT,RIGHT, OLYMPIA

0041-92005

CARRIER DPC LIFT PRODUCER,

0041-91854

FLANGE, FRONT INJECT, RPO2

0041-91300

PLATE LID ALD／CVD WFILL 300MM,,

0041-91251

PLATE, BLANK OFF-LIFTING FIXTURE, CATHOD,

0041-90618

MANIFOLD,OUT,MIX,S1

0041-89674

MANIFOLD, LID GAS／WATER INLET, MDP MO W

0041-89598

LINER, BLACKSTONE, TSGD MK2, SINGLE SLIT

0041-89324

MOTOR COUPLING PLATE，SIDE 2, WAFER LIFT,

0041-89311

HOOP,WAFER LIFT,SIDE 2,LLBE,

0041-89310

＂HOOP,WAFER LIFT,SIDE 1,LLBE＂,

0041-89304

MOTOR MOUNT PLATE, SIDE 2, WAFER LIFT,

0041-88913

MOTOR COUPLING PLATE,SIDE 1, WAFER LIFT,

0041-88859

MOTOR MOUNT PLATE, SIDE 1, WAFER LIFT,

0041-88609

LINER REPACK, VOLTA WW

0041-88118

COOLING HUB, HEATER LIFT ASSY, PRODUCER PRECISION,

0041-87672

WATERBOX,SIDE 1,SPRIAL SH,ALD

0041-87532

＂LOWER CLAMP, FLEXURE ARM, SFV＂,

0041-87525

SENSOR MOUNT, CATHODE LIFT, SHARED

0041-87076

LOWER BRACKET,SIDE2,80DEG GAS SPRING,PRODUCER GT,

0041-87075

LOWER BRACKET,SIDE 1,80DEG GAS SPRING,PRODUCER GT,

0041-86293

MOUNT,ANTI-ROTATION V-4,

0041-86143

LOADLOCK B, ACP, ENP,

0041-86142

LOADLOCK A, ACP, ENP,

0041-86026

FLXR TO POPPET MNTING BLK,

0041-85462

BRKT,PLLW BLOCK,LEFT,MRAM,2.3

0041-85441

BRKT, PLLW BLOCK,RIGHT, MRAM, 2.3,

0041-84181

MOUNT BLOCK, LINEAR GUIDE, WAFER LIFT,ETCH

0041-83848

DUAL MANIFOLD W／EXTRA PORTS, SPIRAL SH, ALD,

0041-83293

FRONT PANEL, GAS PANEL ENCLOSURE, SICONI,

0041-82963

＂COVER, LOWER, AUX LID LIFT, PRODUCER PRECISION＂,

0041-82951

BRACKET,LOWER, AUX LID LIFT, PRODUCER PRECISION,

0041-82913

BRACKET,CHAMBER,AUX LID LIFT,PRODUCER PRECISION,

0041-82287

SUPPORT UPPR CR, INTERFACE EPD, REFLEXION LK PRIME,

0041-82135

FLEXURE, SLURRY ARM, POLISHER

0041-81790

RIGHT HINGE BASE ASSY, BOLTED INDUCTIVE SOURCE

0041-81692

RIGHT HINGE BASE ASSY, WIDE SOURCE, C3

0041-81691

LEFT HINGE BASE ASSY, WIDE SOURCE, C3

0041-81545

WATER MANIFOLD, SST

0041-81461

DRIVE HSG,BASE ASSEMBLY PAD CONDITIONER

0041-80608

MOUNT, FLAG SPACER NGFV／TEP LKP,

0041-79924

GASBOX, LARGE ELECTRODE, LID MOUNTED, PRODUCER GT,

0041-79727

HOUSING, TILT MECHANISM, MRAM 2.3

0041-79157

NUT PLATE WITH PIN LOWER SHIELD,AL 7075

0041-78862

FRICTION CLAMP 2.4

0041-78686

HUB, DZ HEATER WITH LONGER PINS, 300MM, ENDURA 2

0041-78214

ALIGNMENT PLATE II

0041-78188

WRIST PLATE, LOWER,300MM ROBOT, OLYMPIA,

0041-78184

WRIST PLATE, UPPER,300MM ROBOT, OLYMPIA,

0041-77977

SPACER, FLAG NGFV／TEP LKP,

0041-77520

GROUND PLATE, N2 PURGE,C3

0041-77019

ELBOW SHAFT, WING

0041-76975

CHAMBER UPPER LINER 300MM DPS2

0041-75843

BRACKET, 50 DEG, GAS SPRING, NCE, FLOWABLE,PRODUCER GT

0041-75227

RING, INNER CAN, MOUNT, SYM, SD DTCU 200MM DPS,

0041-74980

FLAP DOOR 20KPX DSSL

0041-73497

PLATE COOLING, P-CH, CVD 25KPX

0041-72878 COVER ENCLOSURE RIGHT P-CH 20KPX CVD

0041-72819

DOOR I／O TSSL 20KPS

0041-72799

BRACKET AIR CYLINDER MOUNT IO SIDE 55KX LOADLOCK

0041-71475

BELLOWS HORIZONTAL 90K

0041-70971

BP INLET NOZZLE AND GD CVD 55K

0041-64936

P DOME 12.5, CLEAN FEED, ETERNA FCVD,PRODUCER GT

0041-63962

BLOCK, HARDSTOP, TOP POSITION, OLYMPIA

0041-63001

CAP,HGR,INJECT,MACHINED,THK EPI,G2

0041-62398

LID PLATE, CVD Co，300MM,

0041-62137

LEFT HINGE BASE ASSY, BOLTED INDUCTIVE SOURCE

0041-61867

PLATE, NUT, PIN, MIDDLESHIELD, ALUMINUM,

0041-61568

CHAMBER, UPPER, DPS - DPY,

0041-61187

LID, HINGED, CHAMBER, LARGE ELECTRODE, PRODUCER PRECISION G-GT

0041-61152

LID PLATE SICONI REDUCED CONTACT

0041-60831

BRACKET, HINGE LID, SIDE 2, PRODUCER G-G,

0041-60800

HINGE BRACKET, SIDE 2-CH BODY, PRODUCER G-GT

0041-58592

SCREW BASE HOLDER LIFT PIN FLOATING .09 DIA

0041-58450

BRACKET ACTUATOR, PRECLEAN, 300MM DESICA

0041-55638

EXTENSION BRACKET,RF ROD 2／13MHz MAYA MATCH

0041-54818

PLATE, CENTER SUPPORT LEFT, HARP xT,

0041-54817

PLATE, CENTER SUPPORT RIGHT, HARP xT,

0041-53897

RF COVER, S2, LARGE ELECTRODE, PRODUCER G-GT,

0041-53566

BLOCK,CAMERA MOUNTING,OLYMPIA ELS

0041-53333

TUBING SUPPORT, ARM ASSY

0041-52723

LINER, LOWER CATHODE

0041-52445

PLATE,CH／MF,INSULATOR

0041-52109

INPUT MANIFOLD, CHAMBER BODY, PRODUCER G-GT

0041-51998

PLATE ADAPTER,LOAD LOCK PRODUCER SE,MAKⅡ

0041-51959

HEATING ROD ADAPTER, PRODUCER G-GT,

0041-51682

Wafer Cassette, Platform, BLL, Olympia,

0041-51666

LID PLATE, LOMBARD,ALD,300MM

0041-51584

BELLOWS HOUSING,OLYMPIA BLL,

0041-50595

CHASSIS, FIXED CATHODE C4Z,

0041-50130

CARRIER RING

0041-49882

SIDE COVER,S2 RF,PRODUCER G-GT

0041-49881

SIDE COVER,S1 RF,PRODUCER G-GT

0041-49792

BRACKET PILLOW BLOCK , STD 40-56 MM PD, 300MM,

0041-49482

BOTTOM HEATER ENCLOSURE, ASSY,PRODUCER G-GT

0041-49226

ADAPTER, #205 ORING TO NW16, LOMBARD,ALD

0041-48622

BULKHEAD, WATER LINE, SD DTCU, 200MM DPS,

0041-48600

LID, VIEWING, SOURCE,300MM VHF

0041-48450

HANDLE, ROUND, BOTTOM, TYPE-2, OUTER CAN, SD DTCU - LP, 200MM DPS,

0041-47572

BAFFLE, LOWER, SD DTCU, 200MM DPS,

0041-47100

INPUT MANIFOLD WATER,HP TXZ 200 MM,CIP,IS

0041-46765-1

ASSY, 4-PORT GAS FEEDTHRU, PRODUCER G-GT

0041-46764

ASSY, 3-PORT GAS FEEDTHRU, PRODUCER G-GT

0041-46534

PLENUM, PUMP PORT, PCLL GT,

0041-46483

SOURCE ARM WELDMENT, COMMON, 300MM

0041-45587

ENCLOSURE DOOR, VESSEL ENCLOSURE, CMP,

0041-45351

INNER SHILED, COOL LID,ISANI XT

0041-44110

BAFFLE RETAINER, LAMP, SD-DTCU LP, MEMS, 200MM DPS

0041-43662

BLOCK, LID SWITCH, SELF-ALIGNING SHIELD,VHF, 300MM PVD

0041-43334

MOUNTING RING,DTCU,200MM DPS

0041-42182

CAP, INJECT MACHINED

0041-41522

CLAMP,LOWER MEMBRANE,150MM PROFILER

0041-41516

CARRIER, 150MM PROFILER

0041-41170

BRACKET, LOWER,GAS SPRING, PULL, PRODUCER G-GT,

0041-40844

PUMPING CHANNEL, SIDE 1, UC4 LINER, SACVD PRODUCER SE／GT,

0041-40818

PUMPING CHANNEL, SIDE 2, UC4 LINER, SACVD PRODUCER SE／GT,

0041-39961

HINGE BASE ASSY, RIGHT, INDUCTIVE SOURCE RAISED 1.0 INCH

0041-39957

HINGE BASE ASSY, LEFT, INDUCTIVE SOURCE RAISED 1.0 INCH

0041-37961

CENTURA AP SWLL B COMMON CHAMBER

0041-37960

CENTURA AP SWLL A COMMON CHAMBER

0041-35519

PLATE RF HOUSING MATCH HV MOUNTING

0041-34830

LINER, LOWER, VENTED, WxZ, 300MM,

0041-34814

MANIFOLD BLOCK, PLC 2 VALVE BLOCK, CO+

0041-34799

RF HOUSING FRONT

0041-33664

ASSY, BASE, CERAMIC HEATER, 300MM METAL GATE

0041-33264

ALIGNMENT PLATE II,

0041-32112

OUTPUT MANIFOLD, SIDE 1, INTEGRAL FUNNEL MIXING INSERT, SACVD PRODUCER SE／GT,

0041-32001

OUTPUT MANIFOLD, SIDE 2, INTEGRAL FUNNEL MIXING INSERT, SACVD PRODUCER SE／GT,

0041-30417

WELDMENT 8" HOOP PVD STD CHAMBER

0041-30416

WELDMENT 8＂ HOOP PVD W／B CHAMBER,

0041-28996

PLATE MOUNT ASTRON EX,LOW K PRODUCER SE,

0041-28931

BLANK OFF, HEATED, LID

0041-28285

INNER SHIELD, CVD-Co, 300MM,

0041-27792

BASE. MCA HEATER. RFCAPABLE. 300MM TAN ALD,

0041-27551

SWLL B CHAMBER BODY,

0041-27212

HINGE BASE, RIGHT INDUCTIVE SOURCE RAISED 1.0 INCH, ADVANTEDGE GT

AMAT产品

物料号

名称/工艺要求

物料号

名称/工艺要求

0041-27210

HINGE BASE,LEFT INDUCTIVE SOURCE RAISED 1.0 INCH, ADVANTEDGE GT

0041-12360

STANDOFF, COOLANT FEEDTHRU, EHARP LID, SACVD PRODUCER SE／GT,

0041-11652

BRACKET, LID LIFT, COMET, 300MM,HDP-CVD, ULTIMA-GT

0041-09961

SUPPORT PLATE RPS VALVE,300 MM PRODUCER SE,

0041-09549

BRACKET #1, PEDESTAL ALIGN,

0041-09528

BUSS BARS, K1 LINE, RIGHT, 600A

0041-08981

COMB-SPACER, PHOTOMASK

0041-07972

MPGI RING, PHOTOMASK TETRA III

0041-06511

GAS FEED BLOCK, WIDER TOP COIL, TOP CLEAN, ALN 300MM, HDP-CVD, ULTIMA-X,

0041-05825

CHAMBER UPPER LINER BLANK 300MM,ALUMINIUM

0041-05749

PUMPING PLATE SICONI 300MM TWIN

0041-05676

LOADLOCK B, ACP, ENP,

0041-05675

LOADLOCK A, ACP, ENP,

0041-02659

ADAPTER, 300MM PC XTTURBO／XTE ENDURA2

0041-00431

HOUSING, BEARING AND COUPLING, OUTPUT STATION, 300MM DESICA, CMP

0041-00087

CHAMBER BODY 200MM XZ

0040-99935

ONE-INCH INTEGRATED LINER,300MM,DPN PLUS

0040-99800

JIG, CENTERING SICONI PRECLEAN 300MM CVD ENDURA2

0040-99700

BRACKET, LID LIFT, 300MM ULTIMA DP,

0040-99549-R

CHAMBER LINER RIGHT,YTTRIUM,STEP,PRODUCER EXT

0040-99548-R

CHAMBER LINER LEFT,YTTRIUM,STEP,PRODUCER EXT

0040-96349

SUPPORT,UPPER

0040-93272

BELLOWS MOUNT, ACP BATCH LOADLOCK, ENP

0040-93166

CASSETTE PLATFORM, ACP BATCH LOADLOCK

0040-91638

ELEVATOR, LOADCUP

0040-89762

BRACKET, DIW VALVE HW, UL, C3 200MM LOADCUP

0040-89760

BRACKET, DIW VALVE MAIN MW, C3 200MM LOADCUP

0040-88821

BRACKET LCF SENSORRIGHT PRODUCER ETCH

0040-88820

BRACKET LCF SENSOR LEFT PRODUCER ETCH

0040-88654

CLEAR LID 300MM COMMON

0040-85029

SPOOL 10 IN PRODUCER ETCH

0040-84498

ADAPTER DOME，CLAMPED PRECLEAN 300MM

0040-82926

WELDMENT EBW CHAMBER BOTTOM 200MM XE RTP

0040-82700

SPACER RF SUPPORT 300MM ENABLER,

0040-82375

ADAPTER, PRECLEAN BELL JAR,

0040-80366

ADAPTER, SHORT LIFTABLE HI-COND, RPG P5, 300MM PVD,

0040-80181

CLAMP RING, LOWER, 300MM EPI,

0040-80180

CLAMP RING, UPPER ATMOSPHERIC, 300MM EPI,

0040-80022

CHAMBER MONOLITH W／LCF 300MM ENDURA,

0040-79924

SGD, UPPER, 200MM EMAX

0040-79920

LINER,CATHODE MAG RING,WAFFLE-LESS DIRECT-COOLED

0040-79919

LINER DGDP CHAMBER WAFFLE-LESS200MM EMAX

0040-78768

TOOL, GNG EDGE RING 300MM TXZ HEATER

0040-78010

ARM, RIGHT, PRODUCER VXP ROBOT,

0040-77492

SUPPORT 8＂ CASSETTE TRAY, 8＂ POLISHER

0040-77462

AXLE, WRIST GEAR ROBOT

0040-77436

TRVL HSG 2

0040-77159

PLATE CASSETTE TRAY CMP

0040-76775

LOADLOCK CH, LH ENP,

0040-76663

INSERT, CHAMBER INTERFACE, 300MM ENDURA, .210 ORING

0040-76416

RAIL SENSOR FIXED LL PRODUCER SE／MKII,

0040-75661

SUPPORT,SMIF,INTERFACE,CENTURA MF

0040-75150

FILLER CHAMBER 1 APF PRODUCER SE,

0040-75032

POST CBL FIX, ROBOT Z AXIS CBL, MIRRA CMP

0040-75012

CABLE WRAP SHOULDER AXIS WAFER HDLG. ROBOT

0040-74497

SHIELD／ENCLOSURE OFFSET GAS INLET 15K／15KX

0040-73131

BLOCK GAS MIXTURE RF-HOT SIDE 15K

0040-70792

HOUSING,ROTATION 200MM／300MM,SLOPED GROOVE

0040-64372

MANIFOLD, WATER 300MM WALD FUNNEL LID

0040-64182

BRACKET SOURCE MOTOR, 300MM PVD,

0040-63562

GASLINE INSERT, CHBR FEED THRU, 300MM,

0040-61751

BRACKET MAGNET SUPPORT eMAX 200mm

0040-61266

GAS BOX,SIN,DXZ DCVD

0040-54161

PLATE,CENTER SUPPORT RIGHT PMD 300MM ETERNA,

0040-54160

PLATE CENTER SUPPORT LEFT,PMD 300MM ETERNA,

0040-54102

LID CHAMBER PRODUCER 200MM,

0040-54080

STANDOFF,ASTRON EX,MOUNT PLATE,PRODUCER SE,

0040-53927

GAS BOX CHAMBER LID 200mm PRODUCER,,

0040-53913

MANIFOLD, OUTPUT MIXING BLOCK DxZ, FLUORINE GENERATOR,

0040-53758

PRODUCER E VAT VALVE ADAPTER PLATE

0040-53688

GAS BOX, REMOTE CLEAN, PRODUCER SE,

0040-52861

LID TRANSFER CHAMBER ENP,

0040-52451

FACE PLATE HP+ TXZ 200MM,

0040-51373

LEFT BULKHEAD 200MM EMAX CHAMBER BODY

0040-50789

SUPPORT,ARC CHAMBER UPPER

0040-49739

ADAPTER - WELDMENT - SLIP-RINGS - 300MM REFLEXION

0040-47828

HT SWLL DRIVE V-BLOCK

0040-47724

MANIFOLD,OUTPUT,1 HOLE,LEFT,200MM PRODUCER

0040-47311

HINGE BASE ASSEMBLY BOLTED INDUCTIVE SOURCE 300MM DPS

0040-46663

PLATE LID, TXZ, UF,

0040-45741

BRACKET, PILLOW BLOCK, TIN, 300MM PVD

0040-45712

CARRIER,LOWER LIFT,HEATER

0040-45278

PLATE ADAPTER LL PRODUCER SE

0040-42756

EXTENSION RPS MOUNT ULTIMA+ PH2 HDPCVD

0040-40494

BLOCK,HINGE LID,CHAMBER TOP HDP-CVD, ULTIMA 1.5

0040-39732

END EFFECTOR 200MM MANUAL

0040-39599

BOTTOM STOP ASSY, LADDER, ACP,

0040-39553

CHAMBER BODY, DXZ,

0040-38996

BADE CYLINDER,

0040-38033 CARRIER LOWER PRODUCER

0040-37667

LID PLATE TXZ 200MM CIP

0040-36996

CAN, OUTER HOUSING, DTCU, DPS

0040-35952

OUTER RING

0040-32203

HOUSING, OUTER CATHODE, BULKHEAD DPS,

0040-32135

ASSY,HOUSING,ASP,

0040-23546

BRACKET ASSEMBLY,BELLOWS TWIST, Φ1.574 SHAFT MOT.LIFT

0040-22920

MANIFOLD,MAINFRAME TO CHM GASLINE

0040-22023

ADAPTER, 13＂ SOURCE W／B INTEL ONLY,

0040-21377

ADAPTER ，TIN 8 WAFER, 16 CHAMBER

0040-21177

SHAFT CENTER DDR

0040-18174

BLOCK,WATER FEED,CATHODE,ULTIMA 300MM HDPCVD

0040-09723

UNIBODY ETCH CHAMBER WITH .397 STEP

0040-09557

CHAMBER BODY, ASP,

0040-09270

BRACKET,BASE,SUSCEPTOR LIFT

0040-09263

PLATE PERF 200MM WSI,,

0040-09230

WELDMENT ENCLOSURE RF MATCH.,

0040-09218

BASE THROTTLE VALVE,

0040-09091

GAS BOX 456,PL

0040-07709

COVER, LAMP AC LEFT, 300MM RADIANCE,

0040-06477

CLAMP RING UPPER, RP

0040-04745

CHAMBER BODY ULTIMA HD-CVD

0040-03770

LID PNMPING PLATE, GAS SPRING TEOS, DXZ,

0040-03733

COVER, ORIENTER／DEGAS

0040-03612

ADAPTER PLATE TURBO 300MM xZ

0040-03411

MOUNTING PLATE, SIGMA THROTTLE VALVE,

0040-03349

COOLING WATER BOX 200mm TXZ

0040-02938

GAX MANIFOLD OUTPUT 200MM TXZ CIP

0040-02920

＂MANIFOLD,OUTPUT GAS Uwave WxZ＂,

0040-02834

HANDLE, ROUND, TOP, OUTER CAN, ES DTCU, DPS,

0040-02808

RING, INNER CAN, MOUNT, ES DTCU, DPS

0040-02791

BAFFLE, LOWER,ES DTCU, DPS

0040-02790

HANDLE, ROUND, BOTTOM, OUTER CAN,ES DTCU, DPS

0040-02785

HOUSING, FAN SUPPORT, ES DTCU, DPS

0040-02784

CAN, OUTER HOUSING, ES DTCU, DPS

0040-02544-R

CHAMBER, UPPER, FULL A-COAT, SEALED ON ANODIZE

0040-02132

LID PLATE BKM1 ENHANCED TXZ 200MM,

0040-01834

MANIFOLD INPUT, D下Z FLUORINE GENERATOR,

0040-01549

COVER 8"PEDESTAL,B101 HTR,S-IMP,SST

0040-01547

MANIFOLD OUT LH 200MM PRODUCER SACVD

0040-01511

MANIFOLD FEEDTHRU SINERGY

0040-00684

PLATE ADAPTER,GATE VALVE,TxZ CHMBR, MCVD/IMS COMP

0035-01082

CHAMBER LINER,

0035-00522

CARRIER, CASTED HTR,LIFT,DZ,BDIIX-不做喷砂

0028-73942

PLATE, COMBINED EMO BUTTON MOUNTING, 20K TFE

0028-73931

S／F SUPPORT SHORT SIDE MOD EXT SHIM S-TYPE PCH 100KX CVD,

0028-73832 Rev.1

S COVER-PC LID REAR 25KAXI

0028-73831 Rev.2

S COVER-PC REAR 25KAXI

0028-73705

SHIM REST BUTTON 0.2MM THICK 20K DDG TFE

0028-73704

SHIM REST BUTTON 0.1MM THICK 20K DDG TFE

0028-73703

SHIM REST BUTTON 0.05MM THICK 20K DDG TFE

0028-72935

S／F SUPPORT SV SIDE PCH 15KAX CVD,

0028-72595

S／F SUPPORT SHORT SIDE S-TYPE PCH100KX CVD

0028-72594

S／F SUPPORT LONG SIDE S-TYPE PCH 100KX CVD

0028-71782

S／F SUPPORT SV SIDE VER-IV++ Ra 4.5UM Tapper Lip CVD 55K 1600MIL W／CVR

0028-71779

S／F SUPPORT WINDOW VER-IV++ ROUGHNESS 4.5UM CVD 55K 1600MIL W／CVR

0028-71778

S／F SUPPORT LONG SIDE VER-IV++ ROUGHNESS 4.5UM CVD 55K 1600MIL W／CVR

0028-71770

SCREW COVER S／F SUPPORT FOR 55K CFC SLOT HEAD

0027-74156

COVER-2 SIDE BOTTOM SHIELD DRIP PAN 100K

0027-74088

S／F SUPPORT LONG SIDE PCH 20KPX CVD

0027-73922

HOLDER PIN SUSCEPTOR VIEW PORT PCH 100KX

0027-73797

S／F SUPPORT-V2 SV SIDE PCH 20K TFE DDG

0027-73796

S／F SUPPORT-V2 SV SIDE PCH 20K TFE,

0027-72765

CLAMP BAR DIFFUSER SHORT SIDE CVD 100KX

0027-72531

SCREW RETAINER HEAD REST BUTTON CVD 55KS FOR SHIM MATCH

0027-72506

SPACER FINGER JOINT END EFFECTOR 100KX

0027-72303

S／F SUPPORT WINDOW SIDE PCH 20K TFE DDG

0027-72301

RPSC OUTLET BLOCK NPP 36 W／NPP 45 FLANGE,PCH 25KPXi CVD

0027-72160

CLAMP BAR DIFFUSER SHORT SIDE CVD 20K TFE DDG

0027-72097

SERIP LONG, ADAPTER WINDOW, IO SIDE, DSSL, 20K TFE

0027-72002

PLATE MTG SIGNAL LIGHT TOWER, HANDRAIL MTG

0027-71756

BEZEL, VIEWPORT WINDOW, UV FILTER

0027-71739

OPTIMIZED GAS BLOCK, RPSC W／TEOS INLET 20KPX CVD

0027-71735

SUPPORT,SHADOW FRAME STREAMLINE 60KX

0027-71637

GAS BLOCK ZFFT TO BP CVD 55KSI

0027-71077

S／F SUPPORT LONG SIDE PCH 20K TFE

0026-74899

BLOCKER,CRESCENT,FLOW MIX,55KS

0026-74898

DIFFUSER BAFFLE PLATE CVD 55K,

0026-74716

RF OUTPUT ENCLOSURE BOTTOM WITH 2 PT RF TO BP CONNECTION LEFT, 20KPX P-CH CVD

AMAT产品

物料号

名称/工艺要求

物料号

名称/工艺要求

0026-74715

RF OUTPUT ENCLOSURE BOTTOM WITH 2 PT RF TO BP CONNECTION RIGHT, 25KPXI2 P-CH CVD

0026-74671

FLOW BLOCK ZERO GAP W／RA 180 STREAMLINE RIGHT 55KX／55KS,

0026-74670

FLOW BLOCK ZERO GAP W／RA 180 STREAMLINE LEFT 55KX／55KS,

0026-74645

SPACER, SHAFT STOPPER EPIC 90KX

0026-74635

STRAP,GROUND OMEGA,EPIC 90KX

0026-74534

LASER SUBSTRATE SENSOR MOUNT BRKT

0026-74504

BRACKET FINGER UPPER END EFFECTOR VAC RB

0026-74331

SPACER,PAD HEIGHT ADJUSTMENT MASK VAC RBT EE 20K TFE

0026-73637

SHAFT,MOUNTING,BALL TOP ASSEMBLY,MASK ALIGNER ASSEMBLY PCH 20K TFE

0026-73636

BRACKET PLATE,SHAFT MOUNTING,MASK ALIGNER ASSEMBLY,PCH 20K TFE

0026-73431

WINDOW INSERT CAMERA VIEWPORT-1 PCH 20K TFE CVD

0026-73368

BALL HOLDER,BALL TOP ASSEMBLY,MASK ALIGNER ASSEMBLY, PCH 20K TFE

0026-73340

SUPPORT SHADOW FRAME STREAMLINE 25KPXI

0026-73278

SHIM 2, TAPERED 260 180 SUSCEPTOR 25KPXi 1500X1850,

0026-73197

SPACER,CERAMIC SHAFT,PC 20K TFE TFE

0026-73156

N-TYPE GAS BLOCK RPSC TO ZFFT PCH 55KSI

0026-73092

BLOCK SUBSTRATE SENSOR 55KSI,

0026-72356

FLOW BLOCKER THIN SEGMENTED W／EXIST LINERS RIGHT,w/Ra 180 SURF ROUGH,55KX

0026-72355

FLOW BLOCKER THIN SEGMENTED W／EXIST LINERS LEFT, w／Ra 180 SURF ROUGH, 55KX,

0026-72354

FLOW BLOCKER THIN SEGMENTED W/EXIST LINERS MID,w/Ra 180 SURF ROUGH,55KX

0026-71680

S／F SUPPORT, LONG SIDE, 1600PXI

0026-71479

RELIEVED INNER COVER BAFFLE PLATE 25KPX,TEOS

0026-71478

RELIEVED OUTER COVER,BAFFLE PLATE,25KPX TEOS

0026-71297

RETAINER ORING SUSC COOLING PUMPING 20KP Xi

0026-71165

SPACER BAFFLE PLATE 25KPX TEOS,

0025-74956

SHIM REST BUTTON .2MM THICK 55KPX CVD

0025-73938

GAS BLOCK, ZFFT TO BP, CVD 5500PX TFE&quot

0025-73505

CLAMP UPPER 1 20MM GND STRAP 5500PX TFE

0025-72720

SUSCEPTOR SHIM MIDDLE .140 55KI

0025-72511

BOTTOM BLOCK 1＂ CLAMP, 20KPX CES RF GND STRAP

0025-71910

POWER HARNESS HOLDER 20KPX HC

0025-71719

KEY LONG KEY HOLE ADJUSTABLE CSD 25KPX

0025-71609

LEVER ARM DOOR CLAMP FLAP SIDE 25KPX LOADLOCK

0025-71558

FLOW BLOCKER,THIN SEGMENTED W／EXIST

0025-71431

CLAMP DIAPHRAGM TOP AND BOTTOM 25KPX

0025-71379

STANDOFF M6 X 1.5 IN LG

0025-71240

GAS BLOCK, RPSC TO ZFFT, CVD 55KX

0025-71108

GAS BLOCK ZFFT TO BP CVD 15K UP-GRD

0024-74611

STANDOFF M6 X 2.50 LG,

0024-74307

CENTER BEARING HOUSING IO SIDE 55KX LOADLOCK,

0024-73884

TOP CLAMP 1.63 WIDE RF STRAP,W／4 HOLES,

0024-71772

90K CVD PC GND STRAP TO SUSCEPTOR CLAMP

0024-70242

RF STRAP SUSC. TO CHAMBER 20MM 25KAXI

0023-75035

GROUND STRAP SLOTTED 1.63 WIDE CVD 55K

0023-73870

LINER CORNER VERTICAL 15KAX

0023-73868

LINER VERTICAL UPPER SLIT VALVE 15KAX

0023-73867

LINER VERTICAL LOWER SLIT VALVE 15KAX

0023-73866

LINER VERTICAL WINDOW SIDE 15KAX

0023-73865

LINER VERTICAL LONG SIDE 15KAX

0023-73523

BLK W／NOZZLE HF++,RPSC OUTLET 55K／60K

0023-73315

SHAFTCARRIERI／OLEFT25KAXTSSL

0023-73314

SHAFTCARRIERI／ORIGHT25KAXTSSL

0023-73175

PANEL CSD WITH RF EAR CVD 55K

0023-73168

INSULATOR BSHG BP RING 55K CVD

0023-72690

CENTER SHAFT 55K TSSL,

0023-72640

CLAMP BACKING PLATE CVD 25KAXI

0023-72363

KEY LONG KEY HOLE ADJUSTABLE CSD 50K,

0023-72330

NUT,ADJUSTABLE CSD SCREW

0023-72039

SPACER END EFFECTORVAC RBT 55K

0023-72037

BRACKET LOWER END EFFECTOR VAC RBT 55K,

0023-72035

PLATE CLAMP FINGER LWR EE VAC RBT 55K

0023-71937

COVER TOP 55K SLIT VALVE

0023-71797

SUPPORT SHADOW FRAME SHELF，CVD PC 55K

0023-71771

CLAMP BAR DIFFUSER SHOT SIDE CVD 60K

0023-71769

CLAMP BAR DIFFUSER LONG SIDE CVD 60K

0023-71632

CAMLOCK B LCTR SUPPORT 40K／50K

0023-70820

BODY SLIT VALVE 40KA,OPT-3

0023-70550

LINER VERT UPPER SLIT VALVE SIDE 15KX

0023-58600

ROLLER SHAFT LL SUBST ALIGNMENT EBT 100KHR/KHT GLASS 2940 X 3370

0022-99234

0.3MM ORIFICE, GD MOD, ON,PRISM

0022-99233

0.2MM ORIFICE, GD MOD, ON,PRISM

0022-99231

0022-99231, 0.1MM ORIFICE, GD MOD, ON,,

0022-98490

CHOKE RING, PUMPING PLATE, AL 6061-NO COATING, SINGEN 300MM,

0022-98489

PUMPING PLATE, AL 6061 - NO COATING, POLYGEN LPCVD 300MM,

0022-98423

CHOKE RING, PUMPING PLATE, AL 6061-AL2O3 COAT, SINGEN 300MM,

0022-98415

CHOKE RING, PUMPING PLATE, AL 6061-AL2O3 COAT, SINGEN 300MM,

0022-98408

PUMPING PLATE,AL 6061 - AL2O3 COAT, POLYGEN LPCVD 300MM,

0022-98397

PUMPING PLATE,AL 6061 - AL2O3 COAT, POLYGEN LPCVD 300MM,

0022-98176

BRACKT, ADAPTOR, CHEM WASH OUTPUT,

0022-97765

INSERT SLIT VALVE, AL 6061-AL2O3 COAT, LPCVD,

0022-97639

EDGE RING, 13.0 X .080, NICKEL PLATED NO PURGE, FRONTIER,

0022-97152

PRESS BLOCK, INTERLOCK SWITCH , PRISM,

0022-95841

INNER SHIELD, UPPER, HT MCXT, E2, 300MM,

0022-95166

INSERT SLIT VALVE, AL 6061-NO COATING, LPCVD,

0022-94981

VALVE SEAT, SFV,

0022-94928

RING,,

0022-94849

BLOCK, SEISMIC ON LIDS, PSM,

0022-94848

BLOCK, SEISMIC ON LIDS, PSM,

0022-94498

BAR, BUCKET STIFFENER, eHCLU.,

0022-94442 CLIP, 1／2 IN GAS LINE, 0.02 THK-0.420 OPENING, ATS,

0022-94441

CLIP, 3／8 IN GAS LINE, 0.02 THK-0.285 OPENING, NO EAR ATS,

0022-94440

CLIP, 1／4 IN GAS LINE, 0.02 THK-0.185 OPENING, NO EAR ATS,

0022-94372

LINER, CHAMBER PUMPING HOLE, PSM,

0022-94366

BRACKET, RF FILTER BOX AND MATCH, PSM,

0022-93833

1.195 MM ORIFICE, GD MOD, PSM,

0022-92449

VALVE BLANK OFF, PSM,

0022-91282

CLAMP RING, HHL,

0022-90994

EDGE RING 9 HOLE, PURGE HEATER 200mm TXZ,

0022-90310

BTM PURGE RING, PRECISION,

0022-90299

BRACKET,ENCODER,THETA DRIVE,

0022-89071

COVER, CAMERA WINDOW, FI IR V2,

0022-88387

LINER, ALUMINUM TOP, OPTIMIZED, ETERNA,

0022-88007

0.9MM ORIFICE, GD MOD, ON, PRISM,

0022-88005

0.8MM ORIFICE, GD MOD, ON, PRISM,

0022-87987

0.5MM ORIFICE, GD MOD, ON,,

0022-87986

0.4MM ORIFICE, GD MOD, ON,,

0022-87787

0.7MM ORIFICE, GD MOD ON, PRISM,

0022-85977

CHAMBER LINER, SIDEWALL PRODUCER G-GT,

0022-85940

CLAMP, STRUCTURED CABLE, PART 2, FI IR V2,

0022-85890

SUPPORT RING FACEPLATE

0022-84093

SHIPPING PLATE,INDEXER ROBOT

0022-83933

RPS SUPPORT PLATE, GD MOD, PRISM,

0022-83839

SHIELD, TOP, SINGLE, 300MM PVD

0022-83772

PURGE CURTAIN RING, PUMPING PLATE, BASIS

0022-83199

BRACKET, RF FILTER BOX AND MATCH, PSM,

0022-82904

HEAT SINK, SIDE CH VIEW PORT, PSM,

0022-82189

SEALING RING SUPPORT

0022-82167

COVER DUST CENTER 55K TFE,

0022-82162

SHIELD. UPPER, OAC, 300MM, E2

0022-82112

EDGE RING, GROUND,ALUM,SST HEATER

0022-81856

MIXER,GAS,300MM CVD-CO

0022-81752

PLASMA SCREEN, ANODIZED 300MM DPSII,

0022-81376

SUPPORT ,CENTER SUPPLY LINE,3ZONE,SYM3

0022-80971

TUBE,FEEDTHRU,PRECURSOR,300MM CVD／ALD

0022-80301

PIN, ALIGNMENT, EPI LUX,

0022-80300

PIN, ALIGNMENT, EXTENDED, EPI LUX,

0022-80275

BLOCK, MOUNTING ACTUATOR, RK,

0022-80270

FLANGE, TMD, PAD CONDITIONER,

0022-80061

SHADOW RING, 1.5MM EE, NOTCH, ROT PED,

0022-79877

HOOP, AXI-SWLL, FALCON

0022-79583

SHIELD OUTER, ALD／CVD 300MM ENDURA2

0022-78877

SPACER 4, GROUND PLATE, PSM,,

0022-78876

SPACER 3, GROUND PLATE, PSM,

0022-78875

SPACER 2, GROUND PLATE, PSM,

0022-78874

SPACER 1, GROUND PLATE, PSM,

0022-78533

FILLER, CHAMBER 1 APF, SLIT CLEARANCE, PRODUCER GT,

0022-78531

FILLER, CHAMBER 2 APF, SLIT CLEARANCE, PRODUCER GT,

0022-78289

BRACKET, STOP, Y-AXIS, MOTOR, V3 IMAGER

0022-78262

BRACKET, STOP, X-AXIS, MOTOR, V3 IMAGER

0022-78132

BRACKET, STOP, X-AXIS, END, V3 IMAGER

0022-78086

BRACKET, STOP, Y-AXIS, END, V3 IMAGER

0022-77977

SUPPORT, W／O HEATER,LL,PRODUCER SE,MARK II

0022-77627

STRAP, CVD／ALD, 0.21＂ WIDE

0022-76889

TOP FLANGE, RPS BOTTOM FEED,PRODUCER G-GT

0022-76867

CONNECTING FLANGE OUPUT MF TO ISO VALVE,PRECISIN

0022-76794

Z-DRIVE NON-CONDUCTIVE BOTTOM BLOCK 1600 HDP,

0022-76547

NUT, HEX JAM, M16 x 1 5, ANODIZED AL,

0022-76194

BRACKET,SHORT SIDE,55K TFE EPIC,

0022-76193

BRACKET,SHORT SIDE,55K TFE EPIC,

0022-76096

BONNET MIDDLE PLATE DN 100 VALVE BONNET COVER ASSY 55KS DSSL

0022-75763

LEVELING SCREW, M16 X 1.5, WRENCH FLATS,

0022-75302

CLAMP, TOP CAMERA, IR,

0022-75301

STAGE MOUNT

0022-75063

BRACKET SWITCH SAFETY INTERLOCK QD／PC BO,

0022-74954

COVER LID FRONT CVD 40KA

0022-74883

BRACKET END EFFECTOR VAC RBT 40KA

0022-74875

CLAMP, BAR, DIFFUSER, SHORT SIDE, CVD 40KA,

0022-73887

CENTERING DEVICE LEFT AND RIGHT LEVER I／O SIDE, 50K TSSL,

0022-73824

SHDLR,SCR,ALUM,CENTERING,DIFFUSER EXT

0022-73236

SHAFT,LH DOOR,FV TSSL 40K

0022-72526

RING,SEAL 40K SLIT VALVE 2100x150 OPENING

0022-72524

BLOCK CLAMP 40K SLIT VALVE 2100X150 OPENING

0022-72508

PIN CATHODE ALIGN,

0022-72398

PIN ALIGNMENT CHAMBR LID 40K

0022-72340

PLATE RETAINING BEARING Z-DRIVE 40K

0022-72033

LINER, CORNER VERTICAL, RIGHT SIDE 15K,

0022-71938

CENTERING DEVICE LEVER

0022-71748

LINER TOP MIDDLE WINDOW SIDE 15KA,

AMAT产品

物料号

名称/工艺要求

物料号

名称/工艺要求

0022-71472

LINER VERT LONG SIDE 15KA

0022-71266

STANDOFF UPPER DDSL 25K

0022-70866

PIN PLATE 5500 TSP CVD

0022-70714

BOTTOM FLANGE, RPS BOTTOM FEED,PRODUCER G-GT.

0022-70490

INSERT GUM DROP TYPE-G PCH 20K TFE CVD,

0022-70047

COVER-1 UPPER RIGHT SIDE FRONT 55K TFE PCH CVD,

0022-69638

CLAMP, PTC TUBING FSX LK3.0,

0022-68937

PUMPING PLATE, 200MM W／SKIRT, LPCVD XGEN,

0022-68610

CLAMP, BENCH TESTING, FLEXURE,

0022-68495

LINER, STRAIGHT WALL, 1-PIECE, DZ HTR, WCVD, 300MM,

0022-68442

PUMPING LINER,SILVERADO,

0022-68438

PUMPING PLATE REPACK, VOLTA WW,

0022-68429

TOP COVER, VOLTA W,

0022-68154

BLANK OFF, PSM,

0022-67674

AEC CONNECTOR BRACKET, BOTTOM,

0022-67548

HORIZONTAL POST, AEC,

0022-67443

SHIELD, CANDLESTICK,

0022-67376

ADAPTER, SIDE, KF 40, SSW, PRODUCER 300MM,

0022-67371

MOUNTING BLOCK, WAFER,

0022-66981

BEARING CAP, OBM, I-SRD MIRRA,

0022-66925

LEVELING SCREW, 5／8-18 WRENCH FLATS,

0022-66791

PLATE, BEARING CLAMP, OPTICAL STAGE, OBM,

0022-66589

PLATE, PEDESTAL HOUSING BASE, OBM, CMP 2,

0022-66431

BOTTOM, BKT, SUPPORT,FITTING, HEATER ASSY,POLISHER,

0022-66430

TOP, BKT, SUPPORT, FITTING, HEATER ASSY, POLISHER,

0022-66405

WITNESS COUPON, LPCVD 300MM,

0022-66377

BAFFLE,PIONEER,

0022-65841

MTG BKT, STEAM GENERATOR, CATALYST, P2, POL,

0022-65825

MTG BKT, STEAM GENERATOR, CATALYST, POL,

0022-65035

CATHODE LINER, SILVERADO,

0022-65024

HEATER COVER, UL, GT,

0022-64874

CAM FOLLOWER GUIDE

0022-64613

CLIP, 1／4 IN GAS LINE,0.05 THK - 0.124 OPENING,ATS

0022-64612

CLIP, 1／4 IN GAS LINE，0.02 THK - 0.200 OPENING, ATS

0022-64350

FILTER, UV, CHAMBER BODY, PSM,

0022-64349

FRAME, FRONT CH VIEW PORT, PSM,

0022-63884

CLAMP DIAPHRAGM TOP AND BOTTOM 40KA DSSL,

0022-63543

BAFFLE, RICHMOND 3Z ESC, INCREASED HEIGHT,PIONEER

0022-63334

BLANKOFF, CH FRONT VIEW PORT, PSM

0022-63252

FACEPLATE 200MM SACVD PRODUCER

0022-62986

DISK,SHUTTER,CTR PIN,OS

0022-62711

FRAME PLATE LOWER, PLATE LIFT ON DEMAND, TANK OPTION

0022-62710

FRAME PLATE UPPER, PLATE LIFT ON DEMAND, TANK OPTION

0022-62709

TANK,PLATE UPPER, PLATE 1 AUTOMATIC OPTION

0022-62529

SHIELD, TOP, SINGLE,300MM PVD

0022-62145

BRACKET, LONG SIDE CORNER, 55K TFE EPIC,

0022-62144

BRACKET LONG SIDE 55K TFE EPIC

0022-62143

BRACKET LONG SIDE 55K TFE EPIC

0022-62073

PIN ALIGNMENT SUSC PCH 55K TFE CVD

0022-61990

NTYPE CLEAN GAS BLOCK RPSC TO ZFFT OFD PCH 55K TFE CVD PROD

0022-61392

SHIELD, LOWER, ENCORE CU WOUT／COIL, 300MM

0022-61391

SHIELD, UPPER, 300MM, REV 2.0 SIP CU, 17.731 OD

0022-60954

SUPPORT, W／O HEATER,LL, PRODUCER SE, MARK II

0022-60899

BLANKOFF, PIN LIFT ASSY, SIENA, PRODUCER GT,

0022-60654

FLANGE, LOWER

0022-60652

FLANGE, UPPER,316L,SST

0022-60509

BOTTOM MOUNT, LOTO, PIONEER 2.0,

0022-60508

TOP MOUNT, LOTO PIONEER 2.0,

0022-60464

SPACER, FLAG, HEATER LIFT, SIENA, PRODUCER GT,

0022-60344

BLOCK, STRAP BELLOW

0022-60300

TRAY, BOTTOM LINER

0022-60012

SHIELD UPPER LIFTABLE STDTAN SHORT A101

0022-59667

LID TOP PLATE DSL EBT 90K

0022-56364

SST SEAL CLAMP, (UNIVERSAL) HEAD ASSY, PAD CONDITIONER 200MM,

0022-56078

ADAPTER BLOCK, N2 LOTO VALVE, LK_CATALYST

0022-55745

BLOCK, VIEW PORT, IMAGER

0022-55665

BLANK OFF , OPTIONAL GAS , PRISM,

0022-55565

TRAY, TALL MESH LINER

0022-55558

INSERT, SCREW, SUPER SHIELD, IMPULSE, PVD 300 MM

0022-55320

BLOCKER, TEOS, CIP7, 300MM PRODUCER GT,

0022-55094 Rev.01

SHOULDER BLOCK

0022-55094

SHOULDER BLOCK

0022-55092

WRIST MOTOR BLOCK

0022-54813

PANEL, EZ-UPA PNEUMATIC BULKHEAD

0022-54795

ROTATING INNER SHIELD

0022-54709

ORIFICE PASSTHRU, PSM,

0022-54635

ROTATING SHIELD 2.5 -1 HOLE

0022-54505

COVER PLATE, CHILLER,SICONI PRECLEAN 300MM

0022-54470

BRACKET, BELT TENSIONER, ROBOT TRACK ASSY

0022-54304

ADAPTOR, 12-ZONE FLANGE W／FTG MALE CONNECTOR 1／8NPT ONE-TOUCH OPENINGS,

0022-54303

ADAPTOR, 8-ZONE FLANGE W／FTG MALE CONNECTOR 1／8 NPT ONE-TOUCH OPENINGS,

0022-53928

PUMPING RING TOP,THERMAL,3‘’SINGLE PARTS,ALD

0022-53883

SPACER, SHIP BRACKET,TGB REAR SUPPORT, ADEN

0022-53719

BLANK OFF, STATION,CHAMBER LID

0022-53677

INTRMDIATE PLT, HOOP RNG SHFT CENTURA AP INTRFACE, CLAYTON,

0022-53433

SHIELD OUTER, DUAL RPS, SSW, PRODUCER 300MM,

0022-52715

BEARING PLATE, SHAFT,INTERFACE,MR1237

0022-52527

CLAMP, VFT, TX,

0022-52493

SLIDING RING, THK, TE, SYM3

0022-52453 HOUSING BEARING, BRUSH MOUNT ASSY, FLOW THRU

0022-52433

PAD, BEAM LEVELING,LID PRISM

0022-52188

TUBE, FEEDTHRU,PRECURSOR, 300MM CVD／ALD

0022-51947

SHIELD, UPPER HEATED，AL CLEANCOAT,,400MM TS,ENCORE,II,,TA(N)

0022-51926

RAIL ALIGNMENT CLAMP SA LIFT PSM,

0022-51150

HINGE COVER，RIGHT

0022-51072

STRAP, CVD／ALD, 0.21＂ WIDE,

0022-51054

BRACKET, STOP, Z-AXIS, V2

0022-50746

SHIELD, MIDDLE, 600MM HYBRID CHAMBER

0022-50692

BRACKET, HINGE, COOL 300MM

0022-50337

FRONT HOLDER BM 1200-Z335

0022-50124

SHADOW RING

0022-49739

CLAMP DRIVE SPINDLE,

0022-49710

BRACKET, OVERPRESSURE, RFE EPI,

0022-49239

RPS PURGE PLENUM,PIONEER

0022-49229

CHAMBER LINER, SIDEWALL, LOWER, SR, PRODUCER G-GT

0022-49011

SHADOW RING, 1.5MM EE,NOTCH,ROT,PED

0022-48834

SHIELD, 95MIL GAP, RECESS, PLASMA COAT

0022-48711

SLIDING RING, TE, SYM3

0022-48540

LID FOR LEAK CHECKING BOX

0022-48527

HINGE COVER, LEFT,

0022-48509

SHIELD, TOP, SINGLE,300MM PVD

0022-48465

CLAMP, 1IN OD VIEWPORT

0022-48463

SHIELD COVER,GB RF,PRODUCER G-GT

0022-48398

BLOCK,MOUNTING,TOP,SENSOR,LLKB,WBLL

0022-48397

BLOCK,MOUNTING,BOTTOM,SENSOR,LLKA,WBLL

0022-48396

BLOCK, MOUNTING, TOP, SENSOR, LLKA,WBLL

0022-48341

SHIELD, INNER SINGLE, NO COIL, 300MM PVD

0022-48315

BLANKOFF, RPS FLANGE, BR,

0022-48086

ANTI ROTATION BRACKET, BOTTOM SIDE

0022-48084

GUIDE ROD HOLDER, ANTI ROTATION DEUBLIN

0022-47855

SLIDING RING, YO, TE, RK,

0022-47805

OPEN CHAMBER LINER, COATED, TRILLIUM W,

0022-47519

ADAPTER, SIDE, NW 50, SSW, PRODUCER, 300MM,

0022-47216

CLAMP,CABLE TUBE,DUAL SIDE WAFER POLISH

0022-46886

KEY,SPINDLE SHAFT COUPLING, MR1237

0022-46839

MOUNTING PLATE, MAGNET, APC, 300MM,

0022-46631

TOP HAT RF GROUND, DTESC, VHF

0022-45690

CHOKE RING, PUMPING PLATE, AL 6061-T6 ,AL2O3 COAT, SINGEN 300MM,

0022-45684

PUMPING PLATE,AL 6061 - AL2O3 COAT, POLYGEN LPCVD 300MM,

0022-45355

BLOCK, COOLING INLET, CHAMBER ADAPTER

0022-44570

VERTICAL TRACK HOUSING

0022-44568

SUPPORT, LEFT, E-CHAIN ROBOT TRACK ASSY

0022-44567

BRACKET, E-CHAIN SUPPORT MIRRA ROBOT

0022-44566

SUPPORT, RIGHT E-CHAIN, ROBOT TRACK ASSY

0022-44565

MOUNT, X-AXIS PCB ROBOT,

0022-44563

SHOULDER FLAG

0022-44560

ROBOT X-AXIS RIGHT HARD

0022-44559

WRIST BEARING RETAINER

0022-44558

FLANGE, Z MOTOR MOUNT, ROBOT ARM ASSY

0022-44557

SHOULDER BEARING RETAINER

0022-44555

BALL SCREW BEARING MOUNT

0022-44550

MOUNT SHOULDER MOTOR ROBOT

0022-44549

ADAPTER Z MOTOR MOUNTING ROBOT ARM ASSEMBLY

0022-44546

BRACKET, TRACK BEARING, ROBOT

0022-44545

MOTOR MOUNT, ROBOT X-AXIS ON TRACK INTEGRATION

0022-44544

FLAG

0022-44542

DRIVE BELT BRACKET

0022-44540

COUPLING,IDLER PULLEY ROBOT TRACK ASSY

0022-44539

COUPLING, DRIVE PULLEY, ROBOT X-AXIS

0022-44536

RETAINER, INNER BEARING

0022-44535

FLAG, SENSOR ROBOT WRIST CMP

0022-44533

HARD STOP, TRACK, ROBOT TRACK ASSY,

0022-44532

FLANGE, DRIVE PULLEY ROBOT TRACK ASSY

0022-44531

CLAMP, CABLE TUBE

0022-44530

CLAMP, SLEEVE ROBOT ASSY

0022-44529

CAP. DRIVE SHAFT FOR ROBOT WRIST ASSY

0022-44528

FLANGE, BALL SCREW

0022-44527

FLANGE BALL NUT ROBOT ARM ASSY

0022-44526

FLANGE, WRIST MOUNTING, ROBOT TRACK ASSY

0022-44525

SPACER, IDLER PULLEY BEARING, ROBOT TRACK ASSY

0022-44524

CAP, ARM ROTATION SHAFT

0022-44523

SPACER, PULLEY BEARING, ROBOT TRACK ASSY

0022-44522

SPACER, DRIVE PULLEY BEARING, ROBOT TRACK ASSY

0022-44521

RETAINR DRIVE BELT PULLEY ROBOT TRACK ASSY

0022-44518

CAP, PULLEY SPINDLE

0022-44517

CAP BELT TENSIONER ROBOT TRACK ASSY

0022-44496

INSERT SLIT VALVE, AL 6061-AL2O3 COAT, LPCVD,

0022-44440

HUB DRIVEN PULLEY ROBOT TRACK ASSY

AMAT产品

物料号

名称/工艺要求

物料号

名称/工艺要求

0022-44437

SUPPORT, LEFT E-CHAIN

0022-43567

HOUSING LIFTER, NON-ENP COOLDOWN CHAMBE

0022-43372

BRACKET, EQUIPOTENTIAL DTESC, RF PVD,

0022-42975

O-RING FLANGE, DEC,PRECISION

0022-42863

MOUNTING BLOCK, MFC FLANGE, GAS STICK, AERIS-SI GAS PANEL

0022-42856

LOWER INLET MANIFOLD,6PORTS,300MMALD-TIN

0022-42689

HSR, SHIELD OUTER,300MM ALD-TIN

0022-42441

CHAMBER LINER, LOWER, PRECISION

0022-42440

BOTTOM PUMPING PLATE, PRODUCER G-GT

0022-42048

SHIELD INNER, HT MCXT,E2, 300MM

0022-42032

BAFFLE, RICHMOND 3Z, ESC, PIONEER

0022-41333

CHAMBER LINER, INNER,PRECISION

0022-41332

CHAMBER LINER, LOWER, PRECISION

0022-41330

CHAMBER LINER, UPPER,SIDE WALL,PRECISION

0022-40701

SHIELD, ROTATING, FT

0022-40466

DUBLIN ESC ALIGNMENT VERFICATION BLOCK

0022-39710

FACEPLATE 300MM, AL 6061-T6, AL2O3 COAT, LPCVD,

0022-39668

HOOP,4IN WAFER LIFT,

0022-38630

SPACER GROUND RING

0022-37936

PUMPING LINER, SILVERADO,

0022-37595

SHADOW RING, 5.0MM EE,ROT PED

0022-35663

CHAMBER LINER,SIDEWALL, UPPER, SR,PRODUCER G-GT

0022-35640

CLAMP, 1IN OD VIEWPORT,

0022-35632

BLOCK, CHAMBER MOUNT, PRE-CLEAN,SINGLE ACP 300MM

0022-35512

＂VALVE SEAT, SFV, ISO 400＂,

0022-34806

SHADOW RING, 2.5MM EE, BB

0022-34135

0022-32848

ROTATING SHIELD 2.5 - 4 HOLES,

0022-31008

PLATE, EXHAUST MANIFOLD, MIDDLE, ENP, OLYMPIA

0022-30661

BLOCKER, GBBP, 300MM,

0022-30507

PUMPING LINER, EXTENDED, PRODUCER GT

0022-30024

CONICAL SHIELD, BB

0022-29898

BLOCK, MOUNTING, MOTOR ASSEMBLY

0022-2964015

ORIFICE

0022-28499

COVER, CHAMBER BOTTOM, BCDO, 1-PIECE LINER, WCVD 300MM,

0022-27995

ADAPTER RING,ILLUMINATOR SOURCE, TZEUV

0022-27919

BLANK-OFF, ACTUATOR, VARIABLE GEOM

0022-27725

SLIDING RING, VARIABLE GEOMETRY, SYM3

0022-26537

BLANK-OFF, OES ENDPOINT WINDOW,

0022-25892

COVER,LIFT PIN CAVITY

0022-24163

SLIT LINER DOOR,BLACKSTONE COATED

0022-24109

＂SHIELD, DISC1, MK2,AERIS-S＂,

0022-24108

＂SHIELD, DISC3, MK2,AERIS-S＂,

0022-24107

＂SHIELD, DISC2, MK2,AERIS-S＂,

0022-23236

PUMPING PLATE REPACK, VOLTA WW

0022-23235

TOP COVER, VOLTA WW

0022-23179

MIXER, GAS, 300MM CVD-CO,

0022-22355

＂PLATE, RPS SUPPORT,6061-T6 AL, RPO2＂,

0022-22051

YOKE,80D GAS SPRING,PRODUCER GT

0022-22048

SAFETY SHIELD PLATE,80 DEG,SIDE 2,FLOWABLE,PRODUCER GT

0022-22047

SAFETY SHIELD PLATE,80 DEG,SIDE 1,FLOWABLE,PRODUCER GT

0022-21899

9／16 VCO PLUG

0022-21519

BLANK OFF, RPS COOLING FLANGE, TEOS,

0022-20053

CARRIER, MASK LIFT,LLBE

0022-19695

STOPPER,TEFLON,LASER SENSOR,PRODUCER SE／GT

0022-19388

PLUG PIN,ALUM,SHOWERHEAD,300MM EMAX CTS

0022-18588

CUP SPRING SPACER HEATER LIFT ,PRECISION

0022-18239

BALL JOINT END BOLT, NITRONIC GIMBAL, WCVD

0022-17211

GROUND STRAP, 1.57W X22.24L, CVD 40K

0022-15653

FLAG, NGFV／TEP LK-P,

0022-15646

COVER, MANIFOLD BOX, C3,

0022-15263

NUT PLATE LOWER SHIELD AL 7075

0022-13660

SHAFT, SWING ARM ASSY., SIDE-B, HIGH DF, PRE-CLEAN,

0022-13531

TUBE, FEEDTHRU,PRECURSOR, 300MM CVD／ALD

0022-12723

FACEPLATE, 6061-T6 AL,CLAPTON

0022-12078

SPACER, INNER CAN RING, SYM, SD DTCU - LP, 200MM DPS

0022-11011

EDGE RING,13.0 X .080,NICKEL PLATED,NO PURGE, FRONTIER

0022-10587

RING COVER EXTENDED PVD LAMP REFLOW 300MM ENDURA2

0022-09906

RING COVER EXTENDED PVD LAMP REFLOW 300MM ENDURA2

0022-09386

＂ADAPTER PLATE,RF MATCH＂,

0022-09252

SPACER TIP,BELLOW ACTUATOR,PRE-CLEAN

0022-08864

PLATE, NUT, MIDDLE SHIELD, ALUMINUM,

0022-08835

YOKE, LASER MAPPINGSENSOR, FWM2

0022-08644

CLAMP, BELLOWS ASSY

0022-08502

COVER,MTG,FIBER OPTIC,PRODUCER G-GT,

0022-07845

YOKE, GAS SPRING, PUSH,PRODUCER G-GT

0022-06974

GROUND STRAP, SLOTTED 1.63 WIDE, CVD 55K

0022-06973

RF STRAP, SUSC. TO CHAMBER, 40K

0022-06290

CLAMP,1IN OD EYED WINDOW,

0022-04607

SHIM CENTERING CYLINDER MIRRA HCLU

0022-04338

CLAMP, 1IN OD VIEWPORT

0022-02728

WASHER PLATE,PEDESTAL HEATERS,MSC FCVD PRODUCER GT

0022-02565

COVER HOUSING, PAD CONDITIONER

0022-02551

BASE, GIMBAL, PAD CONDITIONER, POLISHER,

0022-02341

CHAMBER LINER, SIDEWALL PRODUCER G-GT

0022-01921

MANIFOLD, TUBING, PAD CONDITIONER

0022-01919

COVER, TUBING SUPPORT

0022-01639

DALI SR SHIELD, CHUCK SUPPORT, CHAMBER, RTP,

0021-99774

BRACKET, UPPER S1 PUSH, CHAMBER LID ASSY,PRODUCER G-GT

0021-99173 LINER, ALUMINUM TOP,OPTIMIZED, ETERNA,PRODUCER GT

0021-98769

NUT SECTOR

0021-98391

EDGE COVER, NICKEL PLATED, HEATER PEDESTAL ASSEMBLY, R2／FRONTIER, PRODUCER GT

0021-97793

BRACKET UPPER S2 PUSH CHAMBER LID ASSY,PRODUCER G-GT

0021-97599

PUMPING LINER, NICKEL PLATED, NO BEAD BLAST SICONI, PRODUCER GT

0021-97204

BRKT, HDL, LATCH END,OUTER CAN, SD-DTCU-LP, 200MM DPS,

0021-96492

BTM, EXT, RF FEEDTHRU, SD DTCU, 200MM DPS

0021-95769

BAFFLE, COOLING, LID, UPPER DOME, EFS3, EPI 300MM

0021-95555

RING, OUTER, NW 80 WITH 8085,

0021-94689

GAS DIFFUSER, CENTER,COOL LID, ISANI XT

0021-92375

COVER,SHAFT,ALN HEATER,PRODUCER G-GT

0021-91754

EDGE RING, GROUND, ALUM, SST HEATER,

0021-88485

CLAMP,SENSOR,150MM PROFILER

0021-88480

CLAMP,GIMBAL,150MM PROFILER

0021-85133

BRACKET WAFER LOSS SENSOR,

0021-83770

SHIELD COMBINED REFLOW AVATAR

0021-83710

ALUMINIUM CLAMP,INSULATOR TO RF HOUSING

0021-83028

INSERT SPACER,SFV

0021-82861

ADJUSTER THREADED LEVELING PRODUCER G-GT

0021-80312

FACEPLATE, TEOS, PRODUCER, 200MM,

0021-79914

SHAFT PULLEY INPUT STATION

0021-79788

COUPLING SWEEP HEAD ASSY

0021-79099

VERTICAL TRACK HOUSING

0021-78834

WASHER

0021-78744

ELEVATOR, LOAD CUP

0021-78066

LOWER CLAMP 8＂ TITAN HEAD II,

0021-78057

MOUNTING FLANGE 8＂ TITAN HEAD II,

0021-77958

EDGE LOAD RING

0021-77922

HOUSING,GIMBAL BASE

0021-77867

PLATE ADAPTER MOTOR SPINDLE FLEX CLAMP KIT,

0021-77815

SUPPORT, LEFT ,E-CHAIN ROBOT TRACK ASSY

0021-77328

CLAMP,BALL,SCREW,SWEEP HEAD,RETROFIT

0021-76829

COLD PLATE, COOLING,PDSTL,W/VAC,300MM SA-CVD

0021-74672

LINER, VERT, LONG SIDE, 15K,

0021-74670

LINER, VERT, WINDOW SIDE, 15K,

0021-74455

LOWER BRACE PIN PLATE 15K

0021-74418

LINER TOP MIDDLE WINDOW SIDE 15K

0021-74417

LINER TOP RIGHT WINDOW SIDE 15K

0021-74311

BLOCK RPSC TO MIXERSHORT SIDE CVD 5500A LTP

0021-74308

HOUSING W／COOLING SLOTS RESISTOR 5500 LTP

0021-74082

COUPLING SHAFT FLAPVALVE DDSL 15K

0021-73676

STANDOFF UPPER DDSL 15K,

0021-73659

PLATE BOTTOM DDSL 15K

0021-73402

INSERT,GUM DROP, 3 SLOT CVD 4300A LTP

0021-71008

SCREW CERAMIC LIFT PIN BUSHING,CVD 5500

0021-70403

SWLL DRIVE MOUNTING V-BLOCK CAP

0021-70378

MANIFOLD,WATER,INPUT,TXZ

0021-70269

BLANK-OFF,SIDE,LWR CHBR,DPS

0021-70238

SHAFT, LOWER, JOINT 2, 300MM ROBOT

0021-64960

RING, PUMPING C CHANNEL, ETERNA FCVD PRODUCER GT,

0021-60766

BASE, HANDLE, LID PLATE, 300MM CVD-Co

0021-54545

BLOCKER, PERF,SILOX 8"UNIV CH,NON-STEPPED GAS BOX

0021-51962

SHIELD, LOWER, ENCORE CU WOUT／COIL, 300MM,

0021-45153

BASE, 3 WAY VALVE, ALD VALVE, 1.5,

0021-44431

HSR, SHIELD OUTER,300MM ALD-TIN

0021-43438

DISK, SHUTTER,CLEANCOAT, GST SHADOW RING, 300MM PVD-不喷涂

0021-43424

GAUGE,ALIGNMENT CHAMBER／LID LEFT 200／300MM PRODUCER

0021-43398

GAUGE,ALIGNMENT CHAMBER／LID RIGHT,200／300MM PRODUCER

0021-41126

GAS DISTRIBUTION PLATE,37 HOLES

0021-41125

GAS DISTRIBUTION PLATE,133 HOLES,

0021-39422

SUPPORT RIGHT

0021-39189

PLUNGER, ROD, INTERLOCK, DTCU, DPS

0021-39181

HANDLE, ROUND, OUTER CAN, DTCU, DPS POLY

0021-39180

BRACKET, HSG, INTERLOCK, DTCU, DPS

0021-39178

BAFFLE, RETAINER LAMP, DTCU, DPS

0021-38127

TUBE LIFT,DXZ

0021-38052

SLEEVE INCONEL 625 CASSETTE HANDLER,LONG,

0021-38051

SLEEVE INCONEL 625 CASSETTE HANDLER

0021-37497

CLAMP,BLADE,INVERTED MOUNTING, EHP-CR ROBOT

0021-37082

SCREW CAPTIVE THROTTLE VALVE DPS

0021-36191

PLATE PUMPING 8" DCSxZ

0021-35946

EDGE RING,TXZ,200MM,SNNF

0021-35749

RING,ISOLATOR,TxZ 200MM,SNNF

0021-35087

PLATE, BLOCKER, N2／HE CARRIER GAS, DXZ／UNIVERSAL CH,

0021-35023

SCREW OUTER CAPTIVE

0021-35020

SPIDER,WAFER LIFT,XE

0021-35005

ASSY,SCREW INNER CAPT XE

0021-34767

TUBE,FEEDTHRU,PRECURSOR,METAL ALD 300MM

0021-34196-R

CATHODE SLEEVE YTTRIUM OXIDE PRODUCER ETCH

AMAT产品

物料号

名称/工艺要求

物料号

名称/工艺要求

0021-32706

SHUTTLE, DALI SR PIN LIFT

0021-30913

SINGLE COIL TILT RING,.25

0021-28203

LIFTER 8＂INSULATED O／D HIGH UNIFORMITY

0021-27883-R

COVER SLIT

0021-27379

LIFT HOOP LLB OUTER,PRODUCER SE

0021-27378

LIFT HOOP LLA OUTER,PRODUCER SE

0021-26687

CHAMBER COOLING FITTING

0021-23728

YOKE GAS SPRING, PULL 300MM PRODUCER

0021-23550

MANIFOLD,INPUT UNIVERSAL CHAMBER

0021-23198

HOOP, LIFT OPEN 8＂ MCA E-CHUCK

0021-22589

SCREW CAPTIVE CAP SKT HD 10-32X3/4L NITRONIC 60

0021-22419

BLADE,8"TRANSFER,HP+,CVD COMPATIBLE

0021-22028

PEDESTAL,8＂ 101 COVERAGE ENTIRE TEXTURED

0021-21979

SPECIAL SCREW, CAM FOLLOWER

0021-21885

RING,DEPOSITION,JMF ,6"9MM,HTESC,TI／TIN

0021-21857

PLATE MOUNTING PNEU CYL／MOTOR LIFT

0021-21689

8＂ PEDESTAL ADV. 101,BUMP MODIFIED SNNF,

0021-20790

DISK SHUTTER 8" E-CHUCK

0021-20718

PEDESTAL COVER LOWER 8" B101 REV 2.1 SST

0021-20152

CLAMP RING 8 SNNF ,SST,E／E 1.753MM 10402 ARN,

0021-20042

DISK, 8" B101 PROCESS, VECTRA-IMP SST,SHUTTER

0021-19281

GUARD BELLOWS INNER

0021-17737

WAFER SENSOR PLUNGER FOR W+ HEAD 8＂ TUNGSTEN TITAN HEAD

0021-14670

SCREW,ALUM,DXZ PUMPING PLATE,SACVD

0021-13434

SCREEN, FLAT, 300MM POLY DPS2,

0021-11020

BRACKET E-CHAIN SUPPORT MIRRA ROBOT

0021-10666

BLOCK,GAS／WTR CHAMBER LID GIGA-FILL SACVD

0021-10634

PLUG THROTTLE VALVE,UNIV CHAMBER W／DDEEP FLATS

0021-10503

PLATE,GAS DISTRIBUTION,43R-HOLE,TRENCH -N.G.

0021-10328

DOOR SLIT VALVE CENTVRA,SST

0021-10223

LINER CHAMBER CLAMP LID

0021-09914

PLATE,BLOCKER,DXZ SACVD,CENTURA

0021-09723

CARRIER,UPPER HEATER LIFT DXZ

0021-09720

PLATE,5φ MOTOR,HEATER LIFT DxZ

0021-09627

MOUNTING?RING?DOME?DPS?POLY,

0021-09568

PLATE RESTRAINT,MAIN LIFT,DPS

0021-09551

HOUSING BUSHING,THROTTLE 5 PHASE,DPS

0021-09550

CHASSIS,PLATE,THROTTLE,5 PHASE,DPS

0021-09549

HOUSING,BELLOW,THROTTLE,5 PHASE,DPS,

0021-09445

CLAMP, BULKHD,RF PIN,CATHODE DPS,

0021-09105

LIFT PIN,ADJUSTABLE,SHORT SIMPLE CATHODE

0021-09104

LINER,CATHODE,ALIGNED,OXIDE ETCH

0021-08163

BALL STUD GAS SPRING 1／2-13 300MM

0021-08118

WATER COVER COOLDOWN DPS 200MM

0021-07418

SCREW,CENTERING PURGE HEATER 200MM, TXZ

0021-07327

PLATE, BLOCKER, N2 CARRIER 200MM SACVD,

0021-07104

SCREW,CAPTIVE ALN STRIKEPLATE GIGA-FILL SACVD

0021-07092

PLUG,CH-TO-MF, INTERFACE

0021-06714

BRACKET,HANDLE,OUTER CAN,ES DTCU,DPS

0021-06703

SIT, BTM, SHORT RF FEEDTHRU, DTCU, DPS POLY

0021-06316

SHIELD, ALUMINUM 300MM, WXZ,

0021-06079

SHIELD,INNER TxZ,KM

0021-06043

ADAPTOR DxZ TOP MOUNT FLUORINE GENERATOR,

0021-04652

LIFT COVER B101,BLT,101,HTESC,

0021-04643

SHIELD DARK SPACE ALPS

0021-04544

PIN,TIP WAFFRIIFT,LIFT,DPS

0021-04019

CAPTIVE WASHER,ALN STRIKE PLATE,GIGA-FILL SACVD

0021-03980

OUTER SHIELD W／O WINDOW CHAMBER TXZ

0021-03811

＂INPUT MANIFOLD WATER, TXZ 200MM, CIP＂,

0021-03684

PLATE, DAMPER, FAN MOUNT, DTCU, DPS

0021-03637

FACEPLATE, SILANE PRODUCER 200MM

0021-03568

FACEPLATE 200MM SACVD PRODUCER

0021-03094

EDGE RING,PURGE HEATER,200MM TXZ

0021-02983

SHIELD,INNER,TXZ,STD

0021-02795

CAPTIVE WASHER,HASTELLOY,4-40 X .05THK,

0021-02730

SCR,PERF PLATE VENTED WXZ 300MM,

0021-02099

NUTPLATE HOUSING HE FEEDTHRU

0021-02092

PIN,PEDESTAL ALIGNMENT,

0021-01572

FACEPLATE GIGA-FILL SACVD BPSG CENT 23,

0021-01557

COVER, HE FEEDTHRU

0021-01555

ROD,TOP,HV&RF FEED,CERAMIC ESC

0021-01421

CHAMBER,UPPER,A-COAT,M-DPS,

0021-01273

LINER POLY, MXP +, 1/4 THK, REDUCED SLOT

0021-00972

BAFFLE,LOWER,HR-DTCU,DPS

0021-00677

PLUNGER, SHAPED, THROTTLE VALVE, DPS,

0021-00540

PLATE UPPER CBR BLANK DPS-200MM,

0021-00041

FACEPLATE, SIN, XG, DXZ DCVD,

0020-CLN10

TEST COUPON SURFACE CLEANLINESS

0020-99761

CLAMP, HT 3.8MM ALUMINUM BLADE, MODULAR

0020-99260

INDEXER SHAFT CLAMP, ACP BLL

0020-98920

CHANNEL,SCREW RETAINING

0020-98911

THUMBSCREW,M4

0020-97612

RING, 300MM PC XT AL CHAMBER

0020-96262

PLATE SHIELD MOUNTING

0020-91610

PLATE,CLAMP,CH. SHIELD,300MM ENCORE TA(N) II

0020-91292

LINER PUMP PORT THROTTLE VALVE, EMAX 200MM

0020-90540

8" H00P WITH TC

0020-90213

BLOCKER PLATE SILANE 200MM,

0020-89827

SHIELD OUTER, ALD／CVD 300MM ENDURA2

0020-86933 SHIELD,INSULATOR

0020-86319

RETAINER, SPRING BEARING

0020-86016

SCREW BLOCKER WXZ HAST

0020-85684

CLAMP LIFT PIN CH-AB 300MM ENDURA,

0020-85362

SHIELD,INSULATOR,

0020-84818

PLATE SWITCH

0020-83961

ROLLER,SPRING

0020-82783

SCR,10-24*1-1／8,CAP SKT HD, HEX,,HASTELLOY,B2

0020-79869

SUPPORT RIGHT E-CHAIN, ROBOT TRACK ASSY

0020-79242

TRAVEL HUB SHAFT

0020-79207

ADAPTER

0020-79193

LOWER SEAL RETAINER, LOADCUP

0020-79187

INNER BRG SPCR BASE ASSEMBLY PAD CONDITIONER

0020-79185

BEARING CLAMP BASE ASSEMBLY PAD CONDITIONER

0020-79129

Z-AXIS FLAG WAFER HDLG. ROBOT CMP

0020-79097

CLAMP FLEXURE 8 TITAN HEAD

0020-79081

SHOULDER FLAG

0020-79024

BRACKET LOAD CUP

0020-79023

NOZZLE MOUNT LOAD CUP

0020-79022

LINK PIN LOADCUP

0020-79018

PIVOT PIN, LOADCUP

0020-79015

SHAFT BUSHING LOADCUP

0020-79014

SENSOR FLAG LOADCUP

0020-79008

BASE DRAIN LOAD CUP, 200MM

0020-79007

STAR BRACKET LOAD CUP

0020-79006

PLATE, LOAD CUP,

0020-78986

ROBOT X-AXIS RIGHT HARD

0020-78979

WRIST BEARING RETAINER

0020-78977

Z MOTOR FLANGE

0020-78976

FLANGE SHOULDER GEAR ROBOT ARM ASSY,

0020-78975

SHOULDER BEARING RETAINER

0020-78974

HOUSING WRIST ROBOT WRIST ASSEMBLY,

0020-78973

BALL SCREW BEARING MOUNT

0020-78969

SHOULDER BLOCK ROBOT ARM

0020-78967

SLEEVE WRIST DRIVE SHAFT

0020-78964

BLOCK WRIST MOTOR ROBOT ARM ASSY

0020-78962

MOUNT SHOULDER MOTOR ROBOT

0020-78960

ADAPTER Z MOTOR MOUNTING ROBOT ARM ASSY

0020-78946

PP MANIFOLD PP MANIFOLD ASSY UPPER PNEUMATIC TITAN 2

0020-78879

BRACKET, TRACK BEARING, ROBOT

0020-78871

MOTOR MOUNT, ROBOT X-AXIS ON-TRACK INTEGRATION

0020-78868

FLAG

0020-78867

DRIVE BELT BRACKET

0020-78707

BLOCK, MOUNTING SWEEP HEAD

0020-78506

CATCH, CENTERING ARM, LOADCUP

0020-78505

PIN, CENTERING ARM, LOADCUP

0020-78434

COUPLING,IDLER PULLEY ROBOT TRACK ASSY

0020-78433

COUPLING DRIVE PULLEY ROBOT X-AXIS

0020-78417

MOUNT PAD LOAD CUP

0020-78334

RAIL,COVER MOUNTING,

0020-78260

MNTG BRKT 1 LOADCUP

0020-78041

RETAINERINNER BEARING ROBOT WRIST ASSY

0020-78037

FLAG, SENSOR ROBOT WRIST CMP

0020-77961

WAFER BASE 6

0020-77845

RETAINER, LOADCUP

0020-77740

HARD STOP, TRACK ROBOT, TRACK ASSY

0020-77441

SHAFT LOADCUP

0020-77435

CAP, LOADCUP

0020-77433

SPACER LOAD CUP

0020-77423

SENSOR BRACKET , LOAD CUP

0020-77416

PIN CAP LOAD CUP

0020-77337

FLANGE DRIVE PULLEY ROBOT TRACK ASSY

0020-77332

CLAMP,CABLETUBE

0020-77329

CLAMP, SLEEVE ROBOT ASSY

0020-77327

CAP. DRIVE SHAFT FOR ROBOT WRIST ASSY

0020-77322

FLANGE,BALL SCREW

0020-77321

FLANGE, BALL NUT ROBOT ARM ASSY

0020-77319

FLANGE, WRIST MOUNTING ROBOT TRACK ASSY

0020-77305

SPACER IDLER PULLEY BEARING ROBOT TRACK ASSY

0020-77304

CAP,ARM ROTATION SHAFT

0020-77300

SPACER,PULLEY BEARING ROBOT TRACK ASSY

0020-77299

SPACER, DRIVE PULLEY BEARING, ROBOT TRACK ASSY,

0020-77298

RETAINER DRIVE BELT PULLEY ROBOT TRACK ASSY

0020-77297

JAM NUT,ARM ROTATION ROBOT ARM ASSY

0020-77296

JAM NUT, DRIVE SHAFT ROBOT ARM ASSY

0020-77293

CAP PULLEY SPINDLE

0020-77292

Main Cup

0020-77282

BRACKET, BELT TENSIONER, ROBOT TRACK ASSY

0020-77280

HUB DRIVEN PULLEY ROBOT TRACK ASSY

AMAT产品

物料号

名称/工艺要求

物料号

名称/工艺要求

0020-77272

SPACER IDLER PULLEY BEARING ROBOT TRACK ASSY

0020-77265

SUPPORT,LEFTE-CHAIN

0020-77229

NUT, BALL SCREW

0020-77228

RETAINER, BEARING, SPINDLE ASSEMBLY

0020-77217

GUARD SPLASH , SPINDLE ASSEMBLY,

0020-77215

RETAINER, SPLASH GUARD, SPINDLE ASSEMBLY

0020-76836

PIE PLATE BOTTOM FLAG DIRECT DRIVE ROBOT

0020-76637

CASSETTE TOP, ACP BATCH LOADLOCK, 3-COMB

0020-76301

ADAPTER SLIT VALVE

0020-75988

＂LIFTER 200mm WAFER ORIENTER, OPTIMA＂,

0020-75735

Water Manifold 3 Metal Blade HDP-CVD

0020-75465

HOOP UNIVERSAL, 300MM ENDURA 2 P5,

0020-75361

VACUUM PORT COVER,

0020-75101

NUT PLATE DOOR SWITCH

0020-73871

CAP，SCREW RF SPRING SUSCEPTOR CVD

0020-73629

PIN,CAM,LCTR SUPPORT GEN 4.0

0020-73087

BLOCK,RF SPRING, SUSCEPTOR,CVD

0020-71576

SHAFT RIGHT LOAD LOCK DOOR

0020-71575

SHAFT LEFT LOAD LOCK DOOR

0020-70624

FLOWMETER BRACKET, DIW REGULATOR MODULE, C3 200MM LOADCUP

0020-70548

SETCLAMP,ROBOTMOTORSHAFT

0020-70508

PANEL,INDEXER DRIVE ACP

0020-70487

MANIFOLD WATER

0020-70434

DOOR SLIT VALVE

0020-70285

BLADE 8 INCH,BUFFER,FROG LEG

0020-70284

TUBE ROBOT

0020-70272

PIVOT ONE PIECE RIGHT,

0020-70271

PIVOT.ONE PIECE LEFT,

0020-70237

BLADE 6＂ JMF TRANSFER

0020-70056

CAP FITTING PIPE 2"HEAT EXCHANGER

0020-68866

CLAMP,BAR SHORT,LTPS CVD 1600

0020-68865

＂CLAMP,BAR LONG,TIPS CVD1600＂,

0020-66666

PIN CAM LOCATOR SHFT SPRT W／SHANK,

0020-64720

NUTPLATE, SHIELD, STD PVD, 300MM,

0020-64647

AMPLIFIER BOX, C3 200MM LOADCUP,

0020-63413

SCREW,FACEPLATE,4-40 X .54L, ALUMINUM SACVD GIGA-FILL CENTURA

0020-63324

HOOP FIN 300MM W SLOPE COMMON PRODUCER

0020-62774

BRACKET LOAD CUP

0020-61800

BRACKET, ACTUATOR,HDP-CVD

0020-54861

PIN HOOP HASTELLOY WXZ 300MM

0020-54032

HOOP UNIVERSAL, 300MM RPG P5,

0020-52769

BALL HOUSING, UNLOAD ASSIST NOZZLE, C3 200MM LOADCUP

0020-52767

INSTALLATION FIXTURE C3 200MM LOADCUP

0020-52766

ADJUSTMENT FIXTURE, UNLOAD ASSIST NOZZLE, C3 200MM LOADCUP

0020-52563

TRAY GUARD END-SUPPORT, CRESCENT, C3 200MM LOADCUP

0020-52562

TRAY GUARD END-SUPPORT, STRAIGHT, C3 200MM LOADCUP

0020-52251

REAR INLET COVER, AMPLIFIER BOX, C3 200MM LOADCUP,

0020-52250

REAR SEAL BLOCK AMPLIFIER BOX C3 200MM LOADCUP,

0020-52249

REAR INLET BLOCK, AMPLIFIER BOX, C3 200MM LOADCUP

0020-52138

DIW RING, UNLOAD ASSIST NOZZLE, C3 200MM LOADCUP

0020-52129

TRAY GUARD SUPPORT, CRESCENT, C3 200MM LOADCUP,

0020-52128

TRAY GUARD SUPPORT, STRAIGHT, C3 200MM LOADCUP

0020-52113

L-BRACKET, SENSOR CABLE, C3 200MM LOADCUP

0020-51699

I-BRACKET, SENSOR CABLE, C3 200MM LOADCUP

0020-51698

CABLE T-BRACKET, SENSOR CABLE, C3 200MM LOADCUP

0020-49962

LEVER BUSHING, UNLOAD ASSIST FINGER, C3 200MM LOADCUP

0020-49959

FINGER, UNLOAD ASSIST, C3 200MM LOADCUP

0020-49958

WASH TOWER MANIFOLD, EXTERNAL HEAD, C3 200MM LOADCUP

0020-49955

WAFER SENSOR-R BRACKET, LOWER, C3 200MM LOADCUP,

0020-49954

WAFER SENSOR-E BRACKET, UPPER, C3 200MM LOADCUP,

0020-49951

GUIDE BLOCK PEDESTAL, C3 200MM LOADCUP

0020-49950

ADAPTER TRAY AIR-CYLINDER, C3 200MM LOADCUP

0020-49949

COUPLING, PEDESTAL, C3 200MM LOADCUP

0020-49947

TRAY HARDSTOP, LOWER PEDESTAL, C3 200MM LOADCUP

0020-49944

LOWER PEDESTAL, C3 200MM LOADCUP

0020-49943

BASIN MOUNT C3 200MM LOADCUP,

0020-49699

CABLE BRACKET, UPPER WAFER SENSOR, C3 200MM LOADCUP

0020-49557

SLEEVE,SPRING LD PAD CONDITIONER

0020-49163

TRANSFER?STATION?INTEGRATED?SYSTEM C3 200MM LOADCUP,

0020-49070

GUIDE SHAFT, UNLOAD ASSIST FINGER, C3 200MM LOADCUP

0020-49028

FEEDTHRU LOWER CAP, N2 PURGE-SENSOR CABLE, C3 200MM LOADCUP

0020-49027

FEEDTHRU UPPER CAP, N2 PURGE-SENSOR CABLE, C3 200MM LOADCUP

0020-49026

FEEDTHRU, N2 PURGE-SENSOR CABLE, C3 200MM LOADCUP

0020-48700

＂EDGE RING 9 HOLE,PURGE HEATER 200MM TXZ＂,

0020-48445

MEMBRANE CLAMP EXTERNAL 200MM PROFILER 5-ZONE,

0020-47420

MEMBRANE CLAMP INTERNAL,200MM TITAN PROFILER

0020-47187

PLATE, ADAPTER, MOTOR MT, 6-PORT SPINDLE, 200MM MIRRA

0020-47034

CLAMP,REVERSED-Q3

0020-45766

PARTICLE RING, RPK HYBRID, 300MM

0020-44973

COVER RING, CLEANCOAT, SIP ENCORE, 300MM

0020-42287

PLATE PERF 8＂ EC WXZ,

0020-42285

PLATE, BLOCKER 8 INCH EC WXZ,

0020-42262

MANIFOLD GAS W／MIXER EC, WxZ,

0020-42216

BLOCK TOP GAS BELLOWS WxZ

0020-42200

BLOCK CLAMP,BELLOWS W／FLAT GECO,

0020-42082

PLATE,PUMPING,8" FC,WXZ

0020-42032

HINGE,BOTTOM,PMS, WXZ

0020-40779

BLOCK, CYL MT, LLC,

0020-39369

PLATE, PERF OX 200MM TEOS, 18 HOLES,

0020-37787 BRKT,DUAL V-BLOCK,FUJIKIN,METCH

0020-36036

HOUSING MAGNETIC

0020-35059

INSERT,PROCESS CHAMBER SLIT VALVE, SST

0020-34861

RETAINER,LENS & FILTER,H.O.T. DETECTOR MODULE

0020-34696

FILLER SLIT VALVE GECO,

0020-34694

LINER,GDP R2 OXIDE,

0020-34445

PLATE, BLOCKER, DXZ ＂G＂ ECO,

0020-34350

LIFT PIN,CONDUCTIVE,LONG ESC

0020-34316

SHEET, INTERFACE,SOFT AL 1100, 3 THK, SIMPLE CATHODE

0020-34042

SPACER，LIFT CYLINDER

0020-34041

LIFT PIN,SIMPLE CATHODE,LONG

0020-34040

LIFT PIN,SIMPLE CATHODE

0020-34034

CYLINDER, LIFTER, ETCH CHAMBER,

0020-34015

GAS DISTRIBUTION PLATE 101 HOLE ON 8.5" DIA

0020-33810

COVER,GAS FEED ASSY,DSP A3

0020-33806

CHAMBER,UPPER DPS-A3

0020-33803

PAD,FOOT,UPPER CHAMBER,DPS MEC,

0020-33786

PLATE,MXP,GAS DISTRIBUTION,200MM,HEWEB

0020-33774

HOUSING,BUSHING,THROTTLE,DPS,

0020-33669

GAS DISTRIBUTION PLATE,SEE THRU UNI-LID

0020-33366

BLOCKER,PERF 8＂ MOTOROLA

0020-33320

CARRIER,200MM (EXT. CATHODE)

0020-32836

HINGE RIGHT,REMOVEABLE SLIT VALVE

0020-32260

＂GAS DIST PLATE,37 HOLES, .156 THICK＂,

0020-32167

CARRIER,ESC,

0020-32122

COVER SCREW CAP

0020-32060

SCREW,FLT HD,#4-40X1/2 ALUM

0020-32046

BASE EXTENSION,ESC,FOCUS RING,

0020-32036

PLATE, BLOCKER .100 SX,UNVERSAL CHAMBER

0020-31739

CARRIER,ESC FOCUS RING,

0020-31700

SHAFT REMOVABLE THROTTLE VALVE

0020-31693

HOUSING OUTER，HRTV,

0020-31633

LIFT PIN CONDUCTIVE

0020-31632

CARRIER,ESC

0020-31570

LIFT PIN,ANODIZED

0020-31558

PLATE,RF BOX,ESC

0020-31533

PLUG, THROTTLE VALVE, UNIVERSAL CHAMBER

0020-31531

SPCR, WASHER, THROTTLE VALVE

0020-31530

HSG THROTTLE VALVE UNIVERSAL CHAMBER,

0020-31516

SCREW,PAN HD,6-32x3／4,HAYNESALLOY

0020-31515

PIN,LEVELING,REV 1 CERAMIC HOOP

0020-31492

GAS DISTRIBUTION PLATE,101 HOLES

0020-31488

GAS DISTRIBUTION PLATE,13 HOLES,

0020-31476

CYLINDER,LIFT,150MM POLY EXT. CATH,

0020-31467

＂SCREW,6-32X3／8LG.ALUM,VENTED,ASP＂,

0020-31463

CARRIER,COMPLIANT EXT CATHODE

0020-31416

SCREW,6-32 X 82°X .225 SLTD FLT HD,ALUMINUM,

0020-31415

＂SCR,6-32 X 82DEG X .42,SLTD FLT HD,HAYNESALLOF＂,

0020-31162

SCREW ALUM 8-32X1／4 SLOT PAN HD VENTED

0020-31147

INSERT,BASE,ALUM,150／200MM,FLAT

0020-31016

HOUSING QUARTZ TUBE BWCVD

0020-30983

PLATE, TOP CHAMBER PRSP,

0020-30959

＂PLATE, BLOCKER .135 METALICA＂,

0020-30773

PLATE DISTRIBUTION 200MM HEWEB

0020-30752

PLATE, BLOCKER METALLICA TEOS,

0020-30679

CYLINDER CLAMPING POLY／WSI,150MM

0020-30656

SCREW MACH PAN HD. 8-32X.35L,ANODIZED

0020-30588

CARRIER, 8＂ W／FLEX HEWEB

0020-30570

PLATE GAS DISTRIBUTION HEWEB,150MM

0020-30482

COUPLING,FLEX,8",OXIDE

0020-30447

PLATE, BLOCKER ＂SX＂ 6 INCH

0020-30329

SCREW ALUM SKT HD 6-32X1／2LG 7／64 HEX

0020-30115

COVER, GEAR,

0020-30108

SHIELD CLAMP,ALUMINUM 100 THRU 200 mm COMMON SILANE

0020-30085

PUMPING PLATE 4,5&6"NITRIDE GIANT GAP

0020-30084

COVER FRONT THROTTLE VALVE,

0020-30082

BODY,THROTTLE VALVE

0020-30059

PUMPING PLATE,COMMON SILANE,200MM

0020-30000

CLAMP PIN ADJ WB,

0020-29974

CLAMP FEEDTHRU COIL SUPPORT VECTRA-IMP

0020-29642

CLAMP RING 8＂ SNNF, SST, E／E 3.353mm 10405AKS,

0020-29491

BRACKET TxZ CH PROCESS HEATED GAS LINE SUPPORT

0020-29431

CLAMP , 8" SNNF, SST, E／E 2.54MM 10405ARS

0020-29348

CUP, OUTER FEEDTHRU COIL SUPPORT RECESSED,VECTRA-IMP

0020-29332

BAR RF CONNECTOR VECTRA-IMP,

0020-29206

BUSHING RIGID COIL SUPPORT,VECTRA-IMP,

0020-29029

BLADE 6INCH SHUTTER 101

0020-29014

CLAMP RING, 6＂ TTN PADDED 10665ARS,

0020-28867

DISK 8" ADVANCED 101 PROCESS SHUTTER

AMAT产品

物料号

名称/工艺要求

物料号

名称/工艺要求

0020-27871

SCREW, SHOULDER DC BIAS MODIFIED (MOTOROLA)

0020-27490

BAFFLE MODIFIED CLEAN PORT ULTIMA HDP-CVD

0020-27127

Ti PEDESTAL 8＇＇PRECLEAN II EXTERNAL JMF

0020-27116

SCREW PIN MOD DC BIAS SHUTTER COMPATIBLE

0020-27018

CLAMP RING 8"SNNF 10402ARS DURA TTN SST MATL

0020-26961

＂BLADE,8&quot BUFFER,THIN METAL＂,

0020-25549

SHIELD,FEEDTHROUGH PINS

0020-25072

PIN PREHEAT CLAMPING RING

0020-24719

COVER RING 8 INCH 101 AL COVERAGE

0020-24531

SHIELD ADAPTER 8&quotWAFER G12 SST,

0020-24332

SCREW 8-32 X.875"L HEX SKT NITRONIC 60

0020-23843

CLAMP, SHIELD,CHAMBER, 300MM SIP ENCORE TA(N)

0020-23639

STUD, MOUNTING, MOTORIZED LIFT

0020-23439

BRACKET MOUNTING MOTOR MOTORIZED LIFT

0020-23437

BLOCK, MOUNTING, HEATER MOTORIZED LIFT,

0020-23397

RECIEVER BASE

0020-23209

LIFT HOOP,8＂ WIDE BODY 101% COVERAGE

0020-23193

TRUNNION SHORT,LEFT,A.L.L CASSETTE SENSOR 200MM

0020-23160

BRKT, WAFER SENSOR,SM312 CV2,MONOLITH COVER

0020-23153

PIVOT ARM LEFT W／HELICOILS,

0020-23041

CLAMP,SHIELD 8” WAFER

0020-22950

ADAPTER COLLIMATOR SOURCE 13＇＇

0020-22846

GAS TRENCH COVER

0020-22844

PEDESTAL SHIELD,8＂＂PRECLEAN,

0020-22839

PIN PRECLEAN LIFT

0020-22838

LIFT HOOP,PRECLEAN

0020-22695

HONEYCOMB COLLIMATOR 1／2 HEX, 1.5:1 8＂

0020-22618

PIVOT ARM LEFT WITH HELICOILS

0020-22493

CLAMP SHIELD, COLLIMATOR LIPPER 8"

0020-22492

CLAMP SHIELD COLLIMATOR LOWER 8"

0020-22491

PLATE COVER COLLIMATOR 8＂,

0020-22414

8" CHUCK,TC

0020-21901

BRACKET SHIELD TIN 8" WAFER

0020-21829

YOKE,DETECTOR

0020-21486

PLATE CONTACT DC SOURCE 11.3" LEFT

0020-21485

PLATE CONTACT DC SOURCE 13", LEFT

0020-21366

SCREW SHOULDER DC BIAS TIW

0020-21192

BRACKET,SHIPPING PVD WAFER LIFT

0020-21114

BLADE 6 INCHBUFFER ROBOT,

0020-21105

CLAMP 8 INCH BUFFER FROG LEG,

0020-20972

BLOCK, FIXTURE GAS SPRING 13＂

0020-20654

REFLECTOR HEATER, 8" DEGAS

0020-20395

RING, THRU HOLE BEARING RETAINER,

0020-20394

MAGNET RETAINER VACUUM

0020-20393

RING TAPPED BEARING RETAINER,

0020-20342

PIVOT TRANSFER SLIT VALVE,

0020-20119

PAD DC BIAS

0020-20113

HUB DC BIAS SHIELD ASSY,

0020-20112

CLAMP RING,8 INCH SNNF SST 3.378, AL

0020-19896

PLATE GAS DISTRIBUTION,CIR,FIN OX/MLR/NIT.

0020-19475

HT SWLL DRIVE V-BLOCK LOWER HARDSTOP

0020-18929

BULKHEAD MOUNT WAFER TEMP PROBE ULTIMA HDP-CVD

0020-18923

ADAPTOR BIAS RF MATCH ULTIMA HDP-CVD

0020-18879

SCREW,PIVOT,BARRIER SLIT VALVE ULTIMA HDPCVD

0020-18878

PIVOT,BARRIER SLIT VALVE,ULTIMA HDPCVD

0020-18715

INSERT CHAMBER SLIT VALVE HDP-CVD,ULTIMA

0020-18693

CLAMP LONG

0020-18617

CLAMP,TOP,GAS MANIFOLD,HDP-CVD,ULTIMA

0020-18616

CLAMP,BASE GAS MANIFOLD HDP-CVD,ULTIMA

0020-18553

PLATE, ESC PS／BIAS MATCH, ULTIMA HDP-CVD,

0020-18514

WEDGE CLEAN PORT HDP-CVD,ULTIMA

0020-18401

SCREW, DIFFUSER, CLEAN PORT, HDP-CVD

0020-18380

He BLOCK, D／F CATHODE, HDP-CVD,,

0020-18361

SCREW SHOULDER HDP-CVD

0020-18295

COVER,SCREW 3/8-16 UNC,ALUM.

0020-17735

COVER, PAD CONDITIONER ARM, 300MM

0020-17605

BRACKET LOADCUP

0020-17603

MOUNT PAD

0020-17113

COVER MOD,CATHODE BASE,ULTIMA，HDP

0020-16144

PLATE BLOCK INSUL ULTIMA HDP-CVD,

0020-15982

SCREEN, ALUMINUM ULTIMA X HDPCVD

0020-13976

BLOCK, MOUNTING BOTTOM, SENSOR LLKB, WBLL,

0020-13770

STUD,CRYO／GATE VALVE W／HEX SOCKET

0020-13721

BLADE 8 INCH BUFFER HTHU,CHAMFERED

0020-13663

UPPER TELESCOPE, SHADOW RING, DPS II

0020-10891

SCREW,SLTD PAN HD #8-32X1／2,

0020-10889

SCREW,PN HD 6-32X3/8L ,AL

0020-10888

SET SCREW SLOT HALF DOG PT #4-40X5／16

0020-10886

＂SCREW,FLT HD,#4-40X1／4,AL＂,

0020-10771

PERF PLATE 150MM OXIDE,

0020-10730

＂CLAMP,SHIELD WB＂,

0020-10728

CLAMP,SHIELD 4&quot 5&quot 6&quot TEOS

0020-10722

MODIFIED SCREW PERF PLATE, THIN

0020-10707

CLAMP,THROTTLE VALVE,TEOS

0020-10589

PLATE, GAS BOX WB,

0020-10403

＂PUMPING PLATE 4＂,5＂,6＂ SILANE／OXIDE＂,

0020-10324

END HINGE BLOCK RIGHT ULTIMA 1.5

0020-10188

LEVELLING PIN 200MM

0020-10162

＂DIFFUSER,200MM＂,

0020-10122 PLATE PERF 125MM OXIDE,

0020-09912

LIFTING PIN,SPUTTER

0020-09860

SHOE FROUNT 6＂,

0020-09843

SLEEVE WAFER LIFT PIN

0020-09500

LEVER C,SLIT VALVE CHAMBER

0020-09433

PLUG,CONN

0020-09367

SHAFT

0020-09316

PLATE,BLOCKER 150MM

0020-09312

PLATE,BLOCKER 125MM

0020-09131

DOOR,I／O VALVE

0020-09114

LEVER B,SLIT VALVE CHAMBER

0020-09039

BRKT,STRIP OXIDE CATHODE

0020-09031

INSULATING WASHER

0020-09029

COVERING PIPE

0020-09026

CLAMPING CYLINDER

0020-08544

PLATE, CLAMP, COVER, 200MM, MESA, DARK

0020-07626

BRACKET, LID SOURCE BOX 300MM, R1,

0020-06570

PLATE APERTURE MCVD UWAVE

0020-06568

CUP, SPRING CHANBER FRAME ASSY, 300MM HDPCVD

0020-05809

NUT RF FEEDTHRU, .250" WIDE VECTRA-IMP

0020-05605

LIFTER WXZ CMP ORIENTOR 200MM

0020-05586

RING CLAMP,SHIELD SEMI-IMP,REV 1

0020-05535

BLANKOFF,UPPER WAFER SLIDE

0020-04608

COVER TC LINES

0020-04043

BOTTOM PLATE,

0020-03661

PLUG THREADED ALUMINUM ER001

0020-03597

CARRIER,

0020-01842

PLATE,APERTURE CIRCULAR 2 0 DIA.MCVD UWAVE

0020-01271

PLATE PUMPING,200MM NCSR WxZ+

0020-27944

CLAMP RING 6INCH SMF HOT AL HTHU 6 PADS 00665ARN,

0015-76273

GEAR, SPUR PIN HUB, THROTTLE VALVE

0015-73652

MODIFIED CLEVIS PIN 25KPXI HC CASSETTE

0015-73235

MOD COVER LID W／VENT HOLES CVD 50K LTP

0015-72779

INSULATED SCREW MOD BP RING ANCHOR 55K

0015-72678

KEY DOOR BRACKET 55K TSSL

0015-72162

LEAD SCREW Z DRIVE .75 DIA ／ QUADRUPLEX

0015-35078

MOD. PURCH. PARTS MOTOR GEAR

0015-20281

REST BUTTON PEDESTAL 10-24-2A 101% AL COVERAGE

0015-20035

SCREW INSULATOR

0015-12490

FLANGE, 4.5 OD CF,HEATED SHLD

0015-11435

SCREW, SOCKET CAP HEAD, 6-32, 2.75IN LENGTH, 316L SST

0015-11397

SST PULLEY

0015-10374

PIN, LOADCUP ALIGNMENT TO SPINDLE

0015-09311

SCREW, SHOULDER,THROTTLE VALVE

0015-01864

CLAMP, POLISHING HEAD, UNIVERSAL

0015-00425

SCREW, SHOUDER CAPTIVE, 8-32 X 5／8 MODIFIED

0015-00280

SCREW SHOULDER MODIFIED

0010-95327

ASSY, PRESSURE CONTROL VALVE, ISO 400, FALCON,

0010-88619

ASSY, S-SHIELD, AL, R-FRCD, GR-BLST, IMP

0010-88237

ASSY;WF6 DIVERT,NO,VOLTA SELECTIVE W

0010-88094

KIT, LID BYPASS, WATER BOX, COMMON,

0010-87958

GAS STICK, 5% H2／He, APC GAS BOX, PSPEC

0010-87909

XHDR TEOS CLEAR LID ASSY,PRODUCER GT

0010-87900

ASSY, S-SHIELD, AL, RFRCD,GR-BLST, IMPULSE,PVD 300 MM

0010-87359

ASSY, SUPPLY MANIFOLD, 42U GENRACK,

0010-87045

KIT, WATER BOX, PRISM ELS

0010-85418

TOXIC GASBOX ASSY, 1 STICK ENDURA 2, 300MM

0010-84384

ASSY, SUPPLY MANIFOLD, 42U GENRACK,

0010-84324

KIT, SKINS, DZ WATER BOX

0010-84228

ASSY, HEATED GASBOX TAPERED ROOF, HTLLE

0010-82980

ASSY, AERIS-S MK2 CATHODE

0010-81261

KIT, COOLING FLANGE,PEDESTAL,HT MCXT, E2,300MM

0010-80593

CLAMP RING ASSY, UPPER ATM, EPI 300MM

0010-79821

ASSY,PURGEMODULE,SELPRECLEAN,N-ROW,300MMACP

0010-79062

ASSEMBLY,N2 SUPPLY,EPI 300MM

0010-77980

CLAMP RING ASSY, RP UPPER, EPI 300MM

0010-77472

VALVE ASSY

0010-76992

ASSEMBLY, 8＂ REFLECTOR CASSETTE HANDLER LEFT

0010-76753

ASSY; WF6 DIVERT, VOLTA SELECTIVE W

0010-76200

BLANK-OFF, FIXED CATHODE

0010-76196

BLANK-OFF, COMMON CATHODE

0010-75044

ASSY, PRESSURE CONTROL VALVE, ISO 400, SYM3

0010-75044

ASSY, PRESSURE CONTROL VALVE, ISO 400, SYM3

0010-75042

ASSY,PRESSURE CONTROL VALVE,ISO 400,SYM3

0010-70942

ASSY; SIH4 DUMP, VOLTA SELECTIVE W

0010-70941

ASSY; SIH4 DUMP, VOLTA SELECTIVE W

0010-64981

LIFT HOOP ASSY, SIDE 1, LLBE,

0010-63096

ASSY, LIFT PIN HOLDER, INVERTED, PIONEER

0010-62993

ASSY,PLC 4 VALVE,300MM METAL ALD

AMAT产品

物料号

名称/工艺要求

物料号

名称/工艺要求

0010-61580

HINGE ASM,LEFT

0010-57661

ASSY, LID, HINGED,PRODUCER G-GT

0010-56619

HINGE ASM,LEFT,

0010-56617

HINGE ASM,RIGHT

0010-50867

GAS STICK, ENDURA2,

0010-48382

HINGE BASE ASSY,BOLTED INDUCTIVE SOURCE

0010-48356

ASSY, UPPER CLAMP RING, ATM

0010-48134

HINGE BASE ASSY, BOLTED INDUCTIVE SOURCE

0010-40749

ASSY, PRESSURE CONTROL VALVE, ISO 400, FALCON,

0010-39466

LID, UNPLATED CHAMFERED, W／O HTR, MR1237,

0010-36522

ASSY,EDGE RING,TXZ,200MM,SNNF

0010-36202

ASSEMBLY WAFER PIN

0010-33618

LOWER LINER WITH SPOOL INSERT DPS ADVANTEDGE

0010-32805

ASSY HOOP ALIGN FIXTURE

0010-27892

ASSY, LID, HINGED, PRODUCER G-GT,

0010-26058

ASSY, WAFER LIFT, ASP+, CENTURA II

0010-25599

＂ASSY，SLIT VALVE DOOR&MOUNT, SST／VITON＂,

0010-22209

＂ASSY, SLIT VALVE PARKER DOOR & MOUNT＂,

0010-21936

COOLING-HUB-ASSY-HIGH HEAT LOSS,

0010-21877

PILOT VALVE ASSY, MF SV DOOR INTERLOCK, ESI-A 300MM,

0010-19907

CLAMP RING ASSY, UPPER ATM, EPI 300MM,

0010-19906

CLAMP RING ASSY, RP UPPER, EPI 300MM,

0010-15489

GASLINE ASSY, 300MM PIB BACKSIDE ISOLATOR

0010-13944

UPPER CHBR, A-COAT, QUARTZ, VITON, DPS

0010-13833

UPPER CHAMBER,DPS POLY,VITON

0010-05694

FULL SAA, UPPER DPS CHBR, QUARTZ, VITON

0010-03912

ASSY, MANIFOLD, STD EMAX,

0020-32989

0020-32990

0020-32992

0020-32994

0020-32997

0020-32998

0020-33000

0020-33001

0020-33002

0020-33004

0020-33006

0020-33011

0020-33012

0020-33015

0020-33017

0020-33033

0020-33035

0020-33037

0020-33038

0020-33044

0020-33047

0020-33048

0020-33052

0020-33054

0020-33056

0020-33059

0020-33061

0020-33062

0020-33064

0020-33066

0020-33096

0020-33097

0020-33099

0020-33163

0020-33164

0020-33165

0020-33166

0020-33314

0020-33316

0020-33317

0020-33318

0020-33328

0020-33330

0020-33333

0020-33341

0020-33342

0020-33343

0020-33345

0020-33347

0020-33355

0020-33357

0020-33361

0020-33362

0020-33372

0020-33377

0020-33404

0020-33405

0020-33406

0020-33412

0020-33416

0020-33524

0020-33538

0020-33572

0020-33578

0020-33579

0020-33589

0020-33665

0020-33666

0020-33668

0020-33669

0020-33677

0020-33739

0020-33767

0020-33776

0020-33779

0020-33781

0020-33782

0020-33784

0020-33785

0020-33786

0020-33803

0020-33804

0020-33805

0020-33806

0020-33808

0020-33810

0020-33811

0020-33812

0020-33815

0020-33816

0020-33817

0020-33820

0020-33882

0020-33883

0020-33897

0020-33899

0020-33900

0020-33933

0020-33936

0020-33988

0020-33991

0020-33992

0020-33993

0020-33998

0020-34017

0020-34021

0020-34029

0020-34030

0020-34031

0020-34033

0020-34034

0020-34035

0020-34036

0020-34038

0020-34040

0020-34041

0020-34042

0020-34043

0020-34044

0020-34047

0020-34048

0020-34050

0020-34052

0020-34054

0020-34055

0020-34090

0020-34096

0020-34110

0020-34111

0020-34112

0020-34113

0020-34118

0020-34129

0020-34130

0020-34131

0020-34140

0020-34142

0020-34167

0020-34173

0020-34188

0020-34192

0020-34261

0020-34263

0020-34265

0020-34285

0020-34289

0020-34290

0020-34297

0020-34299

0020-34300

0020-34301

0020-34307

0020-34311

0020-34312

0020-34315

0020-34316

0020-34317

0020-34326

0020-34337

0020-34338

0020-34350

0020-34360

0020-34362

0020-34368

0020-34375

0020-34381

0020-34386

0020-34427

0020-34432

0020-34438

0020-34444

0020-34445

0020-34446

0020-34447

0020-34449

0020-34451

0020-34453

0020-34454

0020-34455

0020-34463

0020-34475

0020-34478

0020-34480

0020-34482

0020-34484

0020-34488

0020-34518

0020-34523

0020-34525

0020-34527

0020-34551

0020-34555

0020-34562

0020-34587

0020-34588

0020-34591

0020-34594

0020-34606

0020-34617

0020-34618

0020-34628

0020-34630

0020-34653

0020-34657

0020-34658

0020-34677

0020-34682

0020-34684

0020-34690

0020-34694

0020-34695

0020-34696

0020-34710

0020-34719

0020-34727

0020-34731

0020-34732

0020-34736

0020-34739

0020-34740

0020-34741

0020-34742

0020-34743

0020-34744

0020-34745

0020-34752

0020-34753

0020-34761

0020-34763

0020-34765

0020-34775

0020-34776

0020-34813

0020-34814

0020-34824

0020-34828

0020-34829

0020-34831

0020-34840

0020-34858

0020-34861

0020-34862

0020-34881

0020-34882

0020-34894

0020-34896

0020-34897

0020-34908

0020-34935

0020-34964

0020-34978

0020-34985

0020-34986

0020-34992

0020-35003

0020-35004

0020-35011

0020-35012

0020-35013

0020-35014

0020-35015

0020-35022

0020-35026

0020-35028

0020-35032

0020-35033

0020-35042

0020-35048

0020-35057

0020-35059

0020-35077

0020-35079

0020-35083

0020-35084

0020-35088

0020-35138

0020-35157

0020-35188

0020-35212

0020-35213

0020-35235

0020-35237

0020-35245

0020-35264

0020-35267

0020-35272

0020-35291

0020-35293

0020-35313

0020-35318

0020-35427

0020-35428

0020-35452

0020-35454

0020-35474

0020-35475

0020-35549

0020-35576

0020-35598

0020-35611

0020-35624

0020-35625

0020-35626

0020-35678

0020-35680

0020-35681

0020-35682

0020-35683

0020-35712

0020-35730

0020-35735

0020-35761

0020-35764

0020-35780

0020-35789

0020-35801

0020-35818

0020-35819

0020-35839

0020-35843

0020-35857

0020-35862

0020-35894

0020-35944

0020-35948

0020-35949

0020-35950

0020-35956

0020-35957

0020-35958

0020-35961

0020-35968

0020-35978

0020-35989

0020-35993

0020-36017

0020-36019

0020-36020

0020-36023

0020-36029

0020-36030

0020-36031

0020-36033

0020-36036

0020-36049

0020-36055

0020-36084

0020-36105

0020-36109

0020-36115

0020-36116

0020-36123

0020-36142

0020-36183

0020-36201

0020-36220

0020-36221

0020-36230

0020-36233

0020-36295

0020-36302

0020-36308

0020-36325

0020-36345

0020-36362

0020-36378

0020-36391

0020-36392

0020-36408

0020-36409

0020-36410

0020-36418

0020-36419

0020-36459

0020-36471

0020-36494

0020-36500

0020-36505

0020-36544

0020-36561

0020-36603

0020-36610

0020-36626

0020-36631

0020-36641

0020-36642

0020-36725

0020-36726

0020-36732

0020-36748

0020-36751

0020-36753

0020-36754

0020-36755

0020-36756

0020-36757

0020-36760

0020-36835

0020-36850

0020-36857

0020-36937

0020-36984

0020-37000

0020-37069

0020-37077

0020-37129

0020-37133

0020-37146

0020-37160

0020-37186

0020-37187

0020-37193

0020-37209

0020-37210

0020-37214

0020-37215

0020-37216

0020-37221

0020-37228

0020-37229

0020-37293

0020-37294

0020-37302

0020-37303

0020-37321

0020-37430

0020-37436

0020-37444

0020-37461

0020-37462

0020-37470

0020-37473

0020-37480

0020-37481

0020-37482

0020-37497

0020-37509

0020-37523

0020-37547

0020-37548

0020-37552

0020-37553

0020-37562

0020-37563

0020-37581

0020-37587

0020-37623

0020-37624

0020-37634

0020-37635

0020-37639

0020-37665

0020-37666

0020-37671

0020-37684

0020-37692

0020-37714

0020-37725

0020-37736

0020-37739

0020-37746

0020-37765

0020-37785

0020-37787

0020-37817

0020-37934

0020-37946

0020-37947

0020-37948

0020-37962

0020-37982

0020-37992

0020-37993

0020-38055

0020-38058

0020-38059

0020-38060

0020-38061

0020-38062

0020-38064

0020-38066

0020-38068

0020-38069

0020-38074

0020-38079

0020-38080

0020-38081

0020-38082

0020-38083

0020-38084

0020-38085

0020-38086

0020-38087

0020-38098

0020-38101

0020-38107

0020-38162

0020-38185

0020-38186

0020-38192

0020-38194

0020-38259

0020-38272

0020-38273

0020-38274

0020-38280

0020-38284

0020-38301

0020-38306

0020-38318

0020-38327

0020-38356

0020-38398

0020-38455

0020-38462

0020-38464

0020-38497

0020-38503

0020-38576

0020-38647

0020-38648

0020-38663

0020-38679

0020-38690

0020-38694

0020-38696

0020-38700

0020-38715

0020-38717

0020-38725

0020-38728

0020-38732

0020-38733

0020-38752

0020-38753

0020-38786

0020-38789

0020-38808

0020-38809

0020-38847

0020-38849

0020-38889

0020-38890

0020-38895

0020-38903

0020-38923

0020-38925

0020-38928

0020-38929

0020-38930

0020-38936

0020-38967

0020-39001

0020-39033

0020-39045

0020-39046

0020-39087

0020-39098

0020-39100

0020-39122

0020-39125

0020-39134

0020-39137

0020-39221

0020-39225

0020-39237

0020-39252

0020-39253

0020-39254

0020-39268

0020-39269

0020-39279

0020-39295

0020-39296

0020-39305

0020-39306

0020-39344

0020-39345

0020-39346

0020-39360

0020-39361

0020-39364

0020-39365

0020-39366

0020-39370

0020-39373

0020-39406

0020-39409

0020-39412

0020-39424

0020-39454

0020-39466

0020-39487

0020-39488

0020-39489

0020-39493

0020-39494